Thermal flow meter including fixation wall and concave recess portion for storing end of supporting body

ABSTRACT

The present invention is to improve measurement accuracy of a thermal flow meter. In a thermal flow meter of the invention, a circuit package  400  includes a processing unit  604  in which a passage  605  and a circuit are disposed. An air flow sensing portion  602  is disposed in the passage  605 . A fixing portion  372  is integrally formed with and fixed to the circuit package  400  and forms a bypass passage. The passage  605  of the circuit package  400  is arranged inside the bypass passage. In the bypass passage, a storage portion  384  having a concave portion  383  is formed to face the fixing portion  372 . At least a part of the leading end  401  of the circuit package  400  is contained in the concave portion  383  of the storage portion  384.

TECHNICAL FIELD

The present invention relates to a thermal flow meter.

BACKGROUND ART

A thermal flow meter that measure a flow rate of gas is configured toinclude an air flow sensing portion for measuring a flow rate, such thata flow rate of the gas is measured by performing heat transfer betweenthe air flow sensing portion and the gas as a measurement target. Theflow rate measured by the thermal flow meter is widely used as animportant control parameter for various devices. The thermal flow meteris characterized in that a flow rate of gas such as a mass flow rate canbe measured with relatively high accuracy, compared to other types offlow meters.

However, it is desirable to further improve the measurement accuracy ofthe gas flow rate. For example, in a vehicle where an internalcombustion engine is mounted, demands for fuel saving or exhaust gaspurification are high. In order to satisfy such demands, it is desirableto measure the intake air amount which is a main parameter of theinternal combustion engine with high accuracy. The thermal flow meterthat measures the intake air amount guided to the internal combustionengine has a bypass passage that takes a part of the intake air amountand an air flow sensing portion arranged in the bypass passage. The airflow sensing portion measures a state of the measurement target gasflowing through the bypass passage by performing heat transfer with themeasurement target gas and outputs an electric signal representing theintake air amount guided to the internal combustion engine. Thistechnique is discussed, for example, in JP 2011-252796 A (PTL 1).

In order to measure a flow rate of a gas with high accuracy using athermal flow meter, it is necessary to position and fix an air flowsensing portion of the thermal flow meter in the bypass passage providedin the thermal flow meter co receive a gas flowing through the mainpassage with high accuracy. In the technique discussed in PTL 1, acasing having the bypass passage having a hole formed to insert the airflow sensing portion is formed of resin in advance, and a sensorassembly having the air flow sensing portion is formed separately fromthe casing, so that the sensor assembly is fixed to the casing while theair flow sensing portion is inserted into the hole of the bypasspassage. An elastic adhesive is filled in a gap between the hole of thebypass passage and she air flow sensing portion and a gap of the portionwhere the sensor assembly is inserted into the casing, so that anelastic force of the adhesive absorbs a linear expansion differencetherebetween.

In such a structure, it is difficult to accurately set and fix apositional relationship or an angle relationship between the air flowsensing portion and the bypass passage when the sensor assembly isinserted into the casing. That is, a positional relationship or an anglerelationship between the sensor assembly and the bypass passage providedin the casing may easily change depending on a condition of theadhesive. For this reason, in the thermal flow meter of the related art,it is difficult to further improve the detection accuracy of the flowrate. In general, the thermal flow meter is produced in largequantities. In this large-quantity production process, when the air flowsensing portion is fixed to the bypass passage using an adhesive with apredefined positional relationship or an angular relationship, it wasdifficult to define a positional relationship or an angular relationshipbetween the air flow sensing portion and the bypass passage duringbonding of the adhesive and in a solidification process of the adhesiveand holding such as positional relationship with high accuracy. For thisreason, it was difficult to further improve measurement accuracy of thethermal flow meter in the related art.

In addition, in the technology disclosed in PTL 1, when the air flowsensing portion is disposed in the bypass passage, the end portion ofthe air flow sensing portion is exposed in the bypass passage, and themeasurement target gas flowing through the bypass passage conflicts withthe end portion of the air flow sensing portion to generate a vortex ofthe measurement target gas (also referred to as a wing tip vortex). Thevortex generated in the end portion of the air flow sensing portion isinduced to the downstream side by the measurement target gas flowingthrough the bypass passage, and reaches the heat transfer surface of theair flow sensing portion depending on a position of the heat transfersurface of the air flow sensing portion, and the measurement accuracy ofthe thermal flow meter is degraded. Therefore, in the related art, it isdifficult to further improve the measurement accuracy of the thermalflow meter.

Regarding the above problem, for example, JP 2003-502682 W (PTL 2)discloses a technology of suppressing underflow (Unterstroemung) byforming a transition portion between the outer side surface of a sensorsupporting body and the edge surface of the bypass passage to be flushwith each other.

In she technology disclosed in PTL 2, a seal means is disposed betweenthe end surface of the sensor supporting body and the edge surface ofthe bypass passage to fill a gap formed due to a manufacturing allowableerror, so that the transition portion is formed between the outer sidesurface of the sensor supporting body and the edge surface of the bypasspassage to be flush with each other. Alternatively, the end surface sideof the sensor supporting body is inserted, into a notch provided in theedge surface of the bypass passage, a partitioning wall provided with acover to close the bypass passage is engaged in the notch, and the sealmeans is disposed between the edge surface side of the partitioning walland the outside of the sensor supporting body facing the cover to fill agap formed due to a manufacturing allowable error.

CITATION LIST Patent Literature

-   PTL 1: JP 2011-252796 A-   PTL 2: JP 2003-502682 W

SUMMARY OF INVENTION Technical Problem

However, PTL 2 fails to disclose a method of fixing the sensorsupporting body to the bypass passage provided in the thermal flowmeter. Further, similarly to the technology disclosed in PTL 1, it isconsidered that the sensor supporting body is fixed to the bypasspassage by inserting the sensor supporting body into a hole provided inthe supporting body. Therefore, in the technology disclosed in PTL 2, itis still difficult to accurately set a positional relation and anangular relation between the air flow sensing portion and the bypasspassage to fix them. Further, it is difficult to realize ahighly-accurate measurement of the flow rate.

In this way, the measurement accuracy of the thermal flow meter isdefined based on various factors, and a development of a thermal flowmeter which can realize the highly-accurate measurement of the flow ratehas come to an object in the art while solving the plurality of problemsfor causing a degradation of the measurement accuracy of the thermalflow meter as described above.

The present invention has been made to provide a thermal flow meterhaving high measurement accuracy.

Solution to Problem

To achieve the above object, the present invention provides a thermalflow meter including a bypass passage through which a measurement targetgas received from a main passage flows, an air flow sensing portionwhich measures a heat amount by performing heat transfer through a heattransfer surface with the measurement target gas flowing through thebypass passage, and a supporting body which is integrally formed withthe air flow sensing portion using a first resin material to expose atleast the heat transfer surface. The supporting body includes a passageon which the air flow sensing portion is disposed and a processing uniton which a circuit is disposed. The supporting body is fixed to afixation wall which is integrally formed with the supporting body by asecond resin material and forms the bypass passage, and the passage ofthe supporting body is arranged inside the bypass passage. A storageportion having a concave portion is formed in the bypass passage to facethe fixation wall, and made of a third resin material different from thefirst and second resin materials, and at least a part of an end portionseparated from the fixation wall in the passage of the supporting bodyis contained in the concave portion of the storage portion.

Advantageous Effects of Invention

According to the present invention, it is possible to obtain a thermalflow meter having high measurement accuracy.

Other objects, configurations, and effects will be apparent fromembodiments described below.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a system diagram illustrating an internal combustion enginecontrol system where a thermal flow meter according to an embodiment ofthe invention is used.

FIGS. 2(A) and 2(B) are diagrams illustrating an appearance of thethermal flow meter, in which FIG. 2(A) is a left side view, and FIG.2(B) is a front view.

FIGS. 3(A) and 3(B) are diagrams illustrating an appearance of thethermal flow meter, in which FIG. 3(A) is a right side view, and FIG.3(B) is a rear view.

FIGS. 4(A) and 4(B) are diagrams illustrating an appearance of thethermal flow meter, in which FIG. 4(A) is a plan view, and FIG. 4(B) isa bottom view.

FIGS. 5(A) and 5(B) are diagrams illustrating a housing of the thermalflow meter, in which FIG. 5(A) is a left side view of the housing, andFIG. 5(B) is a front view of the housing.

FIGS. 6(A) and 6(B) are diagrams illustrating a housing of the thermalflow meter, in which FIG. 6(A) is a right side view of the housing, andFIG. 6(B) is a rear view of the housing.

FIG. 7(A) is a partially enlarged view illustrating a part of a statewhere the housing of the thermal flow meter and a rear cover isassembled, and FIG. 7(B) is a partially enlarged view illustrating apart of the cross section taken along a line D-D of FIG. 2(B).

FIG. 8 is an enlarged perspective view illustrating a state of avicinity of a leading end of a circuit package which is arranged insidea bypass passage.

FIG. 9(A) is a partially enlarged view illustrating another embodimentof a state where the housing of the thermal flow meter and the rearcover are assembled, and FIG. 9(B) is a partially enlarged viewillustrating the cross section taken along a line B-B of FIG. 9(A).

FIG. 10 is an enlarged perspective view illustrating a state of thevicinity of the leading end of the circuit package illustrated in FIGS.9(A) and 9(B).

FIG. 11(A) is a partially enlarged view illustrating still anotherembodiment of a state where the housing of the thermal flow meter andthe rear cover are assembled, and FIG. 11(B) is a partially enlargedview illustrating the cross section taken along a line B-B of FIG.11(A).

FIG. 12 is an enlarged perspective view illustrating a state of thevicinity of the leading end of the circuit package illustrated in FIGS.11(A) and 11(B).

FIG. 13(A) is a partially enlarged view illustrating still anotherembodiment of a state where the housing of the thermal flow meter andthe rear cover are assembled, and FIG. 13(B) is a partially enlargedview illustrating the cross section taken along a line BB of FIG. 13(A).

FIG. 14 is a partially enlarged view illustrating a state of a flow pathsurface which is arranged inside the bypass passage.

FIGS. 15(A) to 15(C) are diagrams illustrating an appearance of a frontcover, in which FIG. 15(A) is a left side view, FIG. 15(B) is a frontview, and FIG. 15(C) is a plan view.

FIGS. 16(A) to 16(C) are diagrams illustrating an appearance of a rearcover 301, in which FIG. 16(A) is a left side view, FIG. 16(B) is afront view, and FIG. 16(C) is a plan view.

FIGS. 17(A) to 17(C) are diagrams illustrating an appearance of thecircuit package, in which FIG. 17(A) is a left side view, FIG. 17(B) isa front view, and FIG. 17(C) is a rear view.

FIG. 18 is an explanatory diagram for describing a diaphragm and acommunication hole which connects a gap in the diaphragm and an opening.

FIG. 19 is a diagram illustrating an overview of a manufacturing processof the thermal flow meter and a process of producing the circuitpackage.

FIG. 20 is a diagram illustrating an overview of a manufacturing processof the thermal flow meter and a process of producing the thermal flowmeter.

FIG. 21 is a circuit diagram illustrating an air flow sensing circuit ofthe thermal flow meter.

FIG. 22 is an explanatory diagram illustrating an air flow sensingportion of the air flow sensing circuit.

DESCRIPTION OF EMBODIMENTS

Examples for embodying the invention described below (hereinafter,referred to as embodiments) solves various problems desired as apractical product. In particular, the embodiments solve various problemsfor use in a measurement device for measuring an intake air amount of avehicle and exhibit various effects. One of various problems addressedby the following embodiments is described in the “Problems to Be Solvedby the Invention” described above, and one of various effects obtainedby the following embodiments is described in the “Effects of theInvention.” Various problems solved, by the following embodiments andvarious effects obtained the following embodiments will be furtherdescribed in the “Description of Embodiments.” Therefore, it would beappreciated that the following embodiments also include other effects orproblems obtained or addressed by the embodiments than those describedin “Problems to Be Solved by the Invention” or “Effects of theInvention.”

In the following embodiments, like reference numerals denote likeelements even when they are inserted in different drawings, and theyhave the same functional effects. The components that have beendescribed in previous paragraphs may not be described by denotingreference numerals and signs in the drawings.

1. Internal Combustion Engine Control System Having Thermal Flow MeterAccording to One Embodiment of the Invention

FIG. 1 is a system diagram illustrating an electronic fuel injectiontype internal combustion engine control system having a thermal flowmeter according to one embodiment of the invention. Based on theoperation of an internal combustion engine 110 having an engine cylinder112 and an engine piston 114, an intake air as a measurement target gas30 is inhaled from an air cleaner 122 and is guided to a combustionchamber of the engine cylinder 112 through a main passage 124 including,for example, an intake body, a throttle body 126, and an intake manifold128. A flow rate of the measurement target gas 30 as an intake airguided to the combustion chamber is measured by a thermal flow meter 300according to the invention. A fuel is supplied from a fuel injectionvalve 152 based on the measured flow rate and is mixed with themeasurement target gas 30 as an intake air, so that the mixed gas isguided to the combustion chamber. It is noted that, in this embodiment,the fuel injection valve 152 is provided in an intake port of theinternal combustion engine, and the fuel injected to the intake port ismixed with the measurement target gas 30 as an intake air to form amixed gas, so that the mixed gas is guided to the combustion chamberthrough an intake valve 116 to generate mechanical energy by burning.

In recent years, in many vehicles, a direct fuel injection method havingexcellent effects in exhaust gas purification or fuel efficiencyimprovement is employed, in which a fuel injection valve 152 isinstalled in a cylinder head of the internal combustion engine, and fuelis directly injected into each combustion chamber from the fuelinjection valve 152. The thermal flow meter 300 may be similarly used ina type in which fuel is directly injected into each combustion chamberas well as a type in which fuel is injected into the intake port of theinternal combustion engine of FIG. 1. A method of measuring controlparameters, including a method of using the thermal flow meter 300, anda method of controlling the internal combustion engine, including a fuelsupply amount or an ignition timing, are similar in basic conceptbetween both types. A representative example of both types, a type inwhich fuel is injected into the intake port is illustrated in FIG. 1.

The fuel and the air guided to the combustion chamber have a fuel/airmixed state and are explosively combusted by spark ignition of theignition plug 154 to generate mechanical energy. The gas aftercombustion is guided to an exhaust pipe from the exhaust valve 118 andis discharged to the outside of the vehicle from the exhaust pipe as anexhaust gas 24. The flow rate of the measurement target gas 30 as anintake air guided to the combustion chamber is controlled by thethrottle valve 132 of which opening level changes in response tomanipulation of an accelerator pedal. The fuel supply amount iscontrolled based on the flow rate of the intake air guided to thecombustion chamber, and a driver controls an opening level of thethrottle valve 132, so that the flow rate of the intake air guided tothe combustion chamber is controlled. As a result, it is possible tocontrol mechanical energy generated by the internal combustion engine.

1.1 Overview of Control of Internal Combustion Engine Control System

The flow rate and the temperature of the measurement target gas 30 as anintake air that is received from the air cleaner 122 and flows throughthe main passage 124 are measured by the thermal flow meter 300, and anelectric signal representing the flow rate and the temperature of theintake air is input to the control device 200 from the thermal flowmeter 300. In addition, an output of the throttle angle sensor 144 thatmeasures an opening level of the throttle valve 132 is input to thecontrol device 200, and an output of a rotation angle sensor 146 isinput to the control device 200 to measure a position or a condition ofthe engine piston. 111, the intake valve 116, or the exhaust valve 118of the internal combustion engine and a rotational speed of the internalcombustion engine. In order to measure a mixed ratio state between thefuel amount and the air amount from the condition of exhaust gas 24, anoutput of an oxygen sensor 148 is input to the control device 200.

The control device 200 computes a fuel injection amount or an ignitiontiming based on a flow rate of the intake air as an output of thethermal flow meter 300 and a rotational speed of the internal combustionengine measured from an output of the rotation angle sensor 146. Basedon the computation result of them, a fuel amount supplied from the fuelinjection valve 152 and an ignition timing for igniting the ignitionplug 154 are controlled. In practice, the fuel supply amount or theignition timing is further accurately controlled based on a change ofthe intake temperature or the throttle angle measured by the thermalflow meter 300, a change of the engine rotation speed, and an air-fuelratio state measured by the oxygen sensor 148. In the idle driving stateof the internal combustion engine, the control device 200 furthercontrols the air amount bypassing the throttle valve 132 using an idleair control valve 156 and controls a rotation speed of the internalcombustion engine under the idle driving state.

1.2 Importance of Improvement of Measurement Accuracy of Thermal FlowMeter and Environment for Mounting Thermal Flow Meter

Both the fuel supply amount and the ignition timing as a main controlamount of the internal combustion engine are computed by using an outputof the thermal flow meter 300 as a main parameter. Therefore,improvement of the measurement accuracy, suppression of aging, andimprovement of reliability of the thermal flow meter 300 are importantfor improvement of control accuracy of a vehicle or obtainment ofreliability. In particularly, in recent years, there are a lot ofdemands for fuel saving of vehicles and exhaust gas purification. Inorder to satisfy such demands, it is significantly important to improvethe measurement accuracy of the flow rate of the measurement target gas30 as an intake air measured by the thermal flow meter 300. In addition,it is also important to maintain high reliability of the thermal flowmeter 300.

A vehicle having the thermal flow meter 300 is used under an environmentwhere a temperature change is significant or a coarse weather such as astorm or snow. When a vehicle travels a snowy road, it travels through aroad on which an anti-freezing agent is sprayed. It is preferable thatthe thermal flow meter 300 be designed considering a countermeasure forthe temperature change or a countermeasure for dust or pollutants undersuch a use environment. Furthermore, the thermal flow meter 300 isinstalled under an environment where the internal combustion engine issubjected to vibration. It is also desired to maintain high reliabilityfor vibration.

The thermal flow meter 300 is installed in the intake pipe influenced byheat from the internal combustion engine. For this reason, the heatgenerated from the internal combustion engine is transferred to thethermal flow meter 300 via the intake pipe which is a main passage 124.Since the thermal flow meter 300 measures the flow rate of themeasurement target gas by transferring heat with the measurement targetgas, it is important to suppress influence of the heat from the outsideas much as possible.

The thermal flow meter 300 mounted on a vehicle solves the problemsdescribed in “Problems to Be Solved by the Invention” and provides theeffects described in “Effects of the Invention” as described below. Inaddition, as described below, it solves various problems demanded as aproduct and provides various effects considering various problemsdescribed above. Specific problems or effects solved or provided by thethermal flow meter 300 will be described in the following description ofembodiments.

2. Configuration of Thermal Flow Meter 300

2.1 Exterior Structure of Thermal Flow Meter 300

FIGS. 2(A), 2(B), 3(A), 3(B), 4(A), and 4(B) are diagrams illustratingthe exterior of the thermal flow meter 300, in which FIG. 2(A) is leftside view of the thermal flow meter 300, FIG. 2(B) is a front view, FIG.3(A) is a right side view, FIG. 3(B) is a rear view, FIG. 4(A) is a planview, and FIG. 4(B) is a bottom view. The thermal flow meter 300includes a housing 302, a front cover 303, and a rear cover 304. Thehousing 302 includes a flange 312 for fixing the thermal flow meter 300to an intake body as a main passage 124, an external connector 305having an external terminal. 306 for electrical, connection to externaldevices, and a measuring portion 310 for measuring a flow rate and thelike. The measuring portion 310 is internally provided, with a bypasspassage trench for making a bypass passage. In addition, the measuringportion 310 is internally provided with a circuit package 400 having anair flow sensing portion 602 (refer to FIG. 21) for measuring a flowrate of the measurement target gas 30 flowing through the main passage124 or a temperature detecting portion 452 for measuring a temperatureof the measurement target gas 30 flowing through the main passage 124.

2.2 Effects Based on Exterior Structure of Thermal Flow Meter 300

Since the inlet port 350 of the thermal flow meter 300 is provided inthe leading end side of the measuring portion 310 extending toward thecenter direction of the main passage 124 from the flange 312, the gas inthe vicinity of the center portion distant from the inner wall surfaceinstead of the vicinity of the inner wall, surface of the main passage124 may be input to the bypass passage. For this reason, the thermalflow meter 300 can measure a flow rate or a temperature of the airdistant from the inner wall surface of the main passage 124 of thethermal flow meter 300, so that it is possible to suppress a decrease ofthe measurement accuracy caused by influence of heat and the like. Inthe vicinity of the inner wall surface of the main passage 124, thethermal flow meter 30 is easily influenced by the temperature of themain passage 124, so that the temperature of the measurement target gas30 has a different condition from an original temperature of the gas andexhibits a condition different from an average condition of the main gasinside the main passage 124. In particular, if the main passage 124serves as an intake body of the engine, it may be influenced by the heatfrom the engine and remains in a high temperature. For this reason, thegas in the vicinity of the inner wall surface of the main passage 124has a temperature higher than the original temperature of the mainpassage 124 in many cases, so that this degrades the measurementaccuracy.

In the vicinity of the inner wall surface of the main passage 124, afluid resistance increases, and a flow velocity decreases, compared toan average flow velocity in the main passage 124. For this reason, ifthe as in the vicinity of the inner wall surface of the main passage 124is input to the bypass passage as the measurement target gas 30, adecrease of the flow velocity against the average flow velocity in themain passage 124 may generate a measurement error. In the thermal flowmeter 300 illustrated in FIGS. 2(A) to 4(B), since the inlet port 350 isprovided in the leading end of the thin and long measuring portion 310extending to the center of the main passage 124 from the flange 312, itis possible to reduce a measurement error relating to a decrease of theflow velocity in the vicinity of the inner wall surface. In the thermalflow meter 300 illustrated in FIGS. 2(A) to 4(B), in addition to theinlet port 350 provided in the leading end of the measuring portion 310extending to the center of the main passage 124 from the flange 312, anoutlet port of the bypass passage is also provided in the leading end ofthe measuring portion 310. Therefore, it is possible to further reducethe measurement error.

The measuring portion 310 of the thermal flow meter 300 has a shapeextending from the flange 312 to the center direction of the mainpassage 124, and its leading end is provided with the inlet port 350 forinputting a part of the measurement target gas 30 such as an intake airto the bypass passage and the outlet port 352 for returning themeasurement target gas 30 from the bypass passage to the main passage124. While the measuring portion 310 has a shape extending along an axisdirected to the center from the outer wall of the main passage 124, itswidth has a narrow shape as illustrated in FIGS. 2(A) and 3(A). That isthe measuring portion 310 of the thermal flow meter 300 has a frontsurface having an approximately rectangular shape and a side surfacehaving a thin width. As a result, the thermal flow meter 300 can have abypass passage having a sufficient length, and it is possible tosuppress a fluid resistance to a small value for the measurement targetgas 30. For this reason, using the thermal flow meter 300, it ispossible to suppress the fluid resistance to a small value and measurethe flow rate of the measurement target gas 30 with high accuracy.

2.3 Structure of Temperature Detecting Portion 452

The inlet port 343 is positioned in the flange 312 side from the bypasspassage provided in the leading end side of the measuring portion 310and is opened toward an upstream, side of the flow of the measurementtarget gas 30 as illustrated in FIGS. 2(A) to 3(B) Inside the inlet port343, a temperature detecting portion 452 is arranged to measure atemperature of the measurement target gas 30. In the center of themeasuring portion 310 where the inlet port 343 is provided, anupstream-side outer wall inside the measuring portion 310 included thehousing 302 is hollowed toward the downstream side, the temperaturedetecting portion 452 is formed to protrude toward the upstream sidefrom the upstream-side outer wall having the hollow shape. In addition,front and rear covers 303 and 304 are provided in both sides of theouter wall having hollow shape, and the upstream side ends of the frontand rear covers 303 and 304 are formed to protrude toward the upstreamside from the outer wall having the hollow shape. For this reason, theouter wall having the hollow shape and the front and rear covers 303 and301 in its both sides form the inlet port 343 for receiving themeasurement target gas 30. The measurement target gas 30 received fromthe inlet port 343 makes contact with the temperature detecting portion452 provided inside the inlet port 343 to measure the temperature of thetemperature detecting portion 452. Furthermore, the measurement targetgas 30 flows along a portion that supports the temperature detectingportico 452 protruding from the outer wall of the housing 302 having ahollow shape to the upstream side, and is discharged to the main passage124 from a front side outlet port 344 and a rear side outlet port. 345provided in the front and rear covers 303 and 304.

2.4 Effects Relating to Temperature Detecting Portion 452

A temperature of the gas flowing to the inlet port 343 from the upstreamside of the direction along the flow of the measurement target as 30 ismeasured by the temperature detecting portion 452. Furthermore, the gasflows toward a neck portion of the temperature detecting portion 452 forsupporting the temperature detecting portion 452, so that it lowers thetemperature of the portion for supporting the temperature detectingportion 452 to the vicinity of the temperature of the measurement targetgas 30. The temperature of the intake pipe serving as a main passage 124typically increases, and the heat is transferred to the portion forsupporting the temperature detecting portion 452 through theupstream-side outer wall inside the measuring portion 310 from theflange 312 or the thermal insulation 315, so that the temperaturemeasurement accuracy may be influenced. The aforementioned supportportion is cooled as the measurement target gas 30 is measured by thetemperature detecting portion 452 and then flows along the supportportion of the temperature detecting portion 452. Therefore, it ispossible to suppress the heat from being transferred to the portion forsupporting the temperature detecting portion 452 through theupstream-side outer wall inside the measuring portion 310 from theflange 312 or the thermal, insulation 315.

In particular, in the support portion of the temperature detectingportion 452, the upstream-side outer wall inside the measuring portion310 has a shape concave to the downstream side (as described below withreference to FIGS. 5(A) to 6(B)). Therefore, it is possible to increasea length between the upstream-side outer wall inside the measuringportion 310 and the temperature detecting portion 452. While the heatconduction length increases, a length of the cooling portion using themeasurement target gas 30 increases. Therefore, it is possible to alsoreduce influence of the heat from the flange 312 or the thermalinsulation 315. Accordingly, the measurement accuracy is improved. Sincethe upstream-side outer wall has a shape concaved to the downstream side(as described below with reference to FIGS. 5(A) to 6(B)), it ispossible to easily fix the circuit package 400 (refer to FIGS. 5(A) to6(B)) described below.

2.5 Structures and Effects of Upstream-side Side Surface andDownstream-Side Side Surface of Measuring Portion 310

An upstream-side protrusion 317 and a downstream-side protrusion 318 areprovided in the upstream-side side surface and the downstream-side sidesurface, respectively, of the measuring portion 310 included in thethermal flow meter 300. The upstream-side protrusion 317 and thedownstream-side protrusion 318 have a shape narrowed along the leadingend to the base, so that it is possible to reduce a fluid resistance ofan intake air 30 as flowing through the main passage 124. Theupstream-side protrusion 317 is provided between the thermal insulation315 and the inlet port 343. The upstream-side protrusion 317 has a largecross section and receives a large heat conduction from the flange 312or the thermal insulation 315. However, the upstream-side protrusion 317is cut near the inlet port 343, and a length of the temperaturedetecting portion 452 from the temperature detecting portion 452 of theupstream-side protrusion 317 increases due to the hollow of theupstream-side outer wall of the housing 302 as described below. For thisreason, the heat conduction is suppressed from the thermal insulation315 to the support portion of the temperature detecting portion 452.

A gap including the terminal connector 320 and the terminal connector320 described below is formed between the flange 312 or the thermalinsulation 315 and the temperature detecting portion 452. For thisreason, a distance between the flange 312 or the thermal insulation 315and the temperature detecting portion 452 increases, and the front cover303 or the rear cover 304 is provided in this long portion, so that thisportion serves as a cooling surface. Therefore, it is possible to reduceinfluence of the temperature of the wall surface of the main passage 124to the temperature detecting portion 452. In addition, as the distancebetween the flange 312 or the thermal insulation 315 and the temperaturedetecting portion 452 increases, it is possible to guide a part of themeasurement target gas 30 input to the bypass passage to the vicinity ofthe center of the main passage 124. It is possible to suppress adecrease of the measurement accuracy caused by heat transfer from thewall surface of the main passage 124.

As illustrated in FIG. 2(B) or 3(B), both side surfaces of the measuringportion 310 inserted into the main passage 124 have a very narrow shape,and a leading end of be downstream-side protrusion 318 or theupstream-side protrusion 317 has a narrow shape relative to the basewhere the air resistance is reduced. For this reason, it is possible tosuppress an increase of the fluid resistance caused by insertion of thethermal flow meter 300 into the main passage 124. Furthermore, in theportion where the downstream-side protrusion 318 or the upstream-sideprotrusion 317 is provided, the upstream-side protrusion 317 or thedownstream-side protrusion 318 protrudes toward both sides relative toboth side portions of the front cover 303 or the rear cover 304. Sincethe upstream-side protrusion 317 or the downstream-side protrusion 318is formed of a resin molding, they are easily formed in a shape havingan insignificant air resistance. Meanwhile, the front over 303 or therear cover 304 is shaped to have a wide cooling surface. For thisreason, the thermal flow meter 300 has a reduced air resistance and canbe easily cooled by the measurement target gas flowing through the mainpassage 124.

2.6 Structure and Effects of Flange 312

The flange 312 is provided with a plurality of hollows 314 on its lowersurface which is a portion facing the main passage 124, so as to reducea heat transfer surface with the main passage 124 and make it difficultfor the thermal flow meter 300 to receive influence of the heat. Thescrew hole 313 of the flange 312 is provided to fix the thermal flowmeter 300 to the main passage 124, and a space is formed between asurface facing the main passage 124 around each screw hole 313 and themain passage 124 such that the surface facing the main passage 124around the screw hole 313 recedes from the main passage 124. As aresult, the flange 312 has a structure capable of reducing heat transferfrom the main passage 124 to the thermal flow meter 300 and preventingdegradation of the measurement accuracy caused by heat. Furthermore, inaddition to the heat conduction reduction effect, the hollow 314 canreduce influence of contraction of the resin of the flange 312 duringthe formation of the housing 302.

The thermal insulation 315 is provided in the measuring portion 310 sideof the flange 312. The measuring portion 310 of the thermal flow meter300 is inserted into the inside from an installation hole provided inthe main passage 124 so that the thermal insulation 315 faces the innersurface of the installation hole of the main passage 124. The mainpassage 124 serves as, for example, an intake body, and is maintained ata high temperature in many cases. Conversely, it is conceived that themain passage 124 is maintained at a significantly low temperature whenthe operation is activated in a cold district. If such a high or lowtemperature condition of the main passage 124 affects the temperaturedetecting portion 452 or the measurement of the flow rate describedbelow, the measurement accuracy is degraded. For this reason, aplurality of hollows 316 are provided side by side in the thermalinsulation 315 adjacent to the hole inner surface of the main passage124, and a width of the thermal insulation 315 adjacent to the holeinner surface between the neighboring hollows 316 is significantly thin,which is equal to or smaller than ⅓ of the width of the fluid flowdirection of the hollow 316. As a result, it is possible to reduceinfluence of temperature. In addition, a portion of the thermalinsulation 315 becomes thick. During a resin molding of the housing 302,when the resin is cooled from a high temperature to a low temperatureand is solidified, volumetric shrinkage occurs so that a deformation isgenerated as a stress occurs. By forming the hollow 316 in the thermalinsulation 315, it is possible to more uniformize the volumetricshrinkage and reduce stress concentration.

The measuring portion 310 of the thermal flow meter 300 is inserted intothe inside from the installation hole provided in the main passage 124and is fixed to the main passage 124 using the flange 312 of the thermalflow meter 300 with screws. The thermal flow meter 300 is preferablyfixed to the installation hole provided in the main passage 124 with apredetermined positional relationship. The hollow 314 provided in theflange 312 may be used to determine a positional relationship betweenthe main passage 124 and the thermal flow meter 300. By forming theconvex portion in the main passage 124, it is possible to provide aninsertion relationship between the convex portion and the hollow 314 andfix the thermal flow meter 300 to the main passage 124 in an accurateposition.

2.7 Structures and Effects of External Connector 305 and Flange 312

FIG. 4(A) is a plan view illustrating the thermal flow meter 300. Fourexternal terminal 306 and a calibration terminal 307 are provided insidethe external connector 305. The external terminals 306 include terminalsfor outputting the flow rate and the temperature as a measurement resultof the thermal flow meter 300 and a power terminal for supplying DCpower for operating the thermal flow meter 300. The calibration terminal307 is used to measures the produced thermal flow meter 300 to obtain acalibration value of each thermal flow meter 300 and store thecalibration value in an internal memory of the thermal flow meter 300.In the subsequent measurement operation of the thermal flow meter 300,the calibration data representing the calibration value stored in thememory is used, and the calibration terminal 307 is not used. Therefore,in order to prevent the calibration terminal 307 from hinderingconnection between the external terminals 306 and other externaldevices, the calibration terminal 307 has a shape different from that ofthe external terminal 306. In this embodiment, since the calibrationterminal. 307 is shorter than the external terminal 306, the calibrationterminal 307 does not hinder connection even when the connectionterminal connected to the external terminal 306 for connection toexternal devices is inserted into the external connector 305. Inaddition, since a plurality of hollows 308 are provided along theexternal terminal 306 inside the external connector 305, the hollows 308reduce stress concentration caused by shrinkage of resin when the resinas a material of the flange 312 is cooled and solidified.

Since the calibration terminal 307 is provided in addition to theexternal terminal 306 used during the measurement operation of thethermal flow meter 300, it is possible to measure characteristics ofeach thermal flow meter 300 before shipping to obtain a variation of theproduct and store a calibration value for reducing the variation in theinternal memory of the thermal flow meter 300. The calibration terminal307 is formed in a shape different from that of the external terminal306 in order to prevent the calibration terminal 307 from hinderingconnection between the external terminal 306 and external devices afterthe calibration value setting process. In this manner, using the thermalflow meter 300, it is possible to reduce a variation of each thermalflow meter 300 before shipping and improve measurement accuracy.

3. Entire Structure of Housing 302 and its Effects

3.1 Structures and Effects of Bypass Passage and Air Flow SensingPortion

FIGS. 5(A) to 6(B) illustrate a state of the housing 302 when the frontand rear covers 303 and 304 are removed from the thermal flow meter 300.FIG. 5(A) is a left side view illustrating the housing 302, FIG. 5(B) isa front view illustrating the housing 302, FIG. 6(A) is a right sideview illustrating the housing 302, and FIG. 6(B) is a rear viewillustrating the housing 302.

In the housing 302, the measuring portion 310 extends from the flange312 to the center direction of the main passage 124, and a bypasspassage trench for forming the bypass passage is provided in its leadingend side. In this embodiment, the bypass passage trench is provided onboth frontside and backside of the housing 302. FIG. 5(B) illustrates abypass passage trench on frontside 332, and FIG. 6(B) illustrates abypass passage trench on backside 334. Since an inlet trench 351 forforming the inlet port 350 of the bypass passage and an outlet trench353 for forming the outlet port 352 are provided in the leading end ofthe housing 302, the gas distant from the inner wall surface of the mainpassage 124, that is, the gas flow through the vicinity of the center ofthe main passage 124 can be received as the measurement target gas 30from the inlet port 350. The gas flowing through the vicinity of theinner wall surface of the main passage 124 is influenced by thetemperature of the wall surface of the main passage 124 and has atemperature different from the average temperature of the gas flowingthrough the main passage 124 such as the intake air in many cases. Inaddition, the gas flowing through the vicinity of the inner wall surfaceof the main passage 124 has a flow velocity lower than the average flowvelocity of the gas flowing through the main passage 124 in many cases.Since the thermal flow meter 300 according to the embodiment isresistant to such influence, it is possible to suppress a decrease ofthe measurement accuracy.

The bypass passage formed by the bypass passage trench on frontside 332or the bypass passage trench on backside 334 described above isconnector to the thermal insulation 315 through the outer wall hollowportion 366, the upstream-side outer wall 335, or the downstream-sideouter wall 336. In addition, the upstream-side outer wall 335 isprovided with the upstream-side protrusion 317, and the downstream-sideouter wall 336 is provided with the downstream-side protrusion 318. Inthis structure, since the Thermal flow meter 300 is fixed to the mainpassage 124 using the flange 312, the measuring portion 310 having thecircuit package 400 is fixed to the main passage 124 with highreliability.

In this embodiment, the housing 302 is provided with the bypass passagetrench for forming the bypass passage, and the covers are installed onthe frontside and backside of the housing 302, so that the bypasspassage is formed by the bypass passage trench and the covers. In thisstructure, it is possible to form overall bypass passage trenches as apart of the housing 302 in the resin molding process of the housing 302.In addition, since the dies are provided in both surfaces of the housing302 during formation of the housing 302, it is possible to form both thebypass passage trench on frontside 332 and bypass passage trench onbackside 334 as a part of the housing 302 by using the dies for both thesurfaces. Since the front and rear covers 303 and 304 are provided inboth the surfaces of the housing 302, it is possible to obtain thebypass passages in both surfaces of the housing 302. Since the front andbypass passage trench on frontside 332 and bypass passage trenches onbackside 334 are formed on both the surfaces of the housing 302 usingthe dies, it is possible to form the bypass passage with high accuracyand obtain high productivity.

Referring to FIG. 6(B), a part of the measurement target gas 30 flowingthrough the main passage 124 is input to the inside of the bypasspassage trench on backside 334 from the inlet trench 351 that forms theinlet port 350 and flows through the inside of the bypass passage trenchon backside 334. The bypass passage trench on backside 334 graduallydeepens as the gas flows, and the measurement target gas 30 slowly movesto the front direction as it flows along the trench. In particular, thebypass passage trench on backside 334 is provided with a steep slopeportion 347 that steeply deepens to the upstream portion 342 of thecircuit package 400, so that a part of the air having a light mass movesalong the steep slope portion 347 and then flows through the side of themeasurement surface 430 illustrated in FIG. 5(B) in the upstream portion342 of the circuit package 400. Meanwhile, since a foreign object havinga heavy mass has difficulty in steeply changing its path due to aninertial force, it moves to the side of the backside of measurementsurface 431 illustrated in FIG. 6(B). Then, the foreign object flows nothe measurement surface 430 illustrated in FIG. 5(B) through thedownstream portion 341 of the circuit package 400.

Here, a flow of the measurement target gas 30 in the vicinity of theheat transfer surface exposing portion 436 will be described withreference no FIG. 14. In the bypass passage trench on frontside 332 ofFIG. 5(B), the air as a measurement target gas 30 moving from theupstream portion 342 of the circuit package 400 to the bypass passagetrench on frontside 332 side flows along the measurement surface 430,and heat transfer is performed with the air flow sensing portion. 602for measuring a flow rate using the heat transfer surface exposingportion 436 provided in the measurement surface 430 in order to measureflow rate. Both the measurement target gas 30 passing through themeasurement surface 430 or the air flowing from the downstream portion341 of the circuit package 400 to the bypass passage trench on frontside332 flow along the bypass passage trench on frontside 332 and aredischarged from the outlet trench 353 for forming the outlet port 352 tothe main passage 124.

A substance having a heavy mass such as a contaminant mixed in themeasurement target gas 30 has a high inertial force and has difficultyin steeply changing its path to the deep side of the trench along thesurface of the steep slope portion 347 of FIG. 6(B) where a depth of thetrench steeply deepens. For this reason, since a foreign object having aheavy mass moves through the side of the backside of measurement surface431, it is possible to suppress the foreign object from passing throughthe vicinity of the heat transfer surface exposing portion 436. In thisembodiment, since most of foreign objects having a heavy mass other thanthe gas pass through the backside of measurement surface 431 which is arear surface of the measurement surface 430, it is possible to reduceinfluence of contamination caused by a foreign object such as an oilcomponent, carbon, or a contaminant and suppress degradation of themeasurement accuracy. That is, since the path of the measurement targetgas 30 steeply changes along an axis across the flow axis of the mainpassage 124, it is possible to reduce influence of a foreign objectmixed in the measurement target gas 30.

In this embodiment, the flow path including the bypass passage trench onbackside 334 is directed to the flange from the leading end of thehousing 302 along a curved line, and the gas flowing through the bypasspassage in the side closest to the flange flows reversely to the flow ofthe main passage 124, so that the bypass passage in the rear surfaceside as one side of this reverse flow is connected to the bypass passageformed in the front surface side as the other side. As a result, it ispossible to easily fix the heat transfer surface exposing portion 436 ofthe circuit package 400 to the bypass passage and easily receive themeasurement target gas 30 in the position close to the center of themain passage 124.

In this embodiment, there is provided a configuration in which thebypass passage trench on backside 334 and the bypass passage trench onfrontside 332 are penetrated in the front and rear sides of the flowdirection of the measurement surface 430 for measuring the flow rate.Meanwhile, the leading end side of the circuit package 400 is notsupported by the housing 302, but has a cavity portion 382 such that thespace of the upstream portion 342 of the circuit package 400 isconnected to the space of the downstream portion 341 of the circuitpackage 400. Using the configuration penetrating the upstream portion342 of the circuit package 400 and the downstream portion 341 of thecircuit package 400, the bypass passage is formed such that themeasurement target gas 30 moves from the bypass passage trench onbackside 334 formed in one surface of the housing 302 to the bypasspassage trench on frontside 332 formed in the other surface of thehousing 302. In this configuration, it is possible to form the bypasspassage trench on both surfaces of the housing 302 through a singleresin molding process and perform molding with a structure for matchingthe bypass passage trenches on both surfaces.

By clamping both sides of the measurement surface 430 formed in thecircuit package 400 using a mold die to cover the leading end side ofthe circuit package 400 when the housing 302 is molded, it is possibleto form the configuration penetrating the upstream portion 342 of thecircuit package 400 and the downstream portion 341 of the circuitpackage 400 or the cavity portion 382, perform resin molding for thehousing 302, and embed the circuit package 400 in the housing 302. Sincethe housing 302 is formed by inserting the circuit package 400 into thedie in this manner, the circuit package 400 can be integrally formedwith and fixed to a fixing portion 372 included in the bypass passageand it is possible to embed the circuit package 400 and the heattransfer surface exposing portion 436 to the bypass passage with highaccuracy.

In this embodiment, a configuration penetrating the upstream portion 342of the circuit package 400 and the downstream portion 341 of the circuitpackage 400 is provided. However, a configuration penetrating any one ofthe upstream portion 342 and the downstream portion 341 of the circuitpackage 400 may also be provided, and the bypass passage shape thatlinks the bypass passage trench on backside 334 and the bypass passagetrench on frontside 332 may be formed through a single resin moldingprocess.

An inside wall of bypass passage on backside 391 and an outside wall ofbypass passage on backside 392 are provided in both sides of the bypasspassage trench on backside 334, and the inner side surface of the rearcover 304 abuts on the leading end portions of the height direction ofeach of the inside wall of bypass passage on backside 391 and theoutside wall of bypass passage on backside 392, so that the bypasspassage on backside is formed in the housing 302. In addition, an insidewall of bypass passage on frontside 393 and an outside wall of bypasspassage on frontside 394 are provided in both sides of the bypasspassage trench on frontside 332, and the inner side surface of the frontcover 303 abuts on the leading end portions of the height direction ofthe inside wall of bypass passage on frontside 393 and the outside wallof bypass passage on frontside 394, so that the bypass passage onfrontside is formed in the housing 302.

In the embodiment, since the circuit package 400 is integrally formedwith and fixed to the fixing portion 372, it is possible to embed thecircuit package 400 and the heat transfer surface exposing portion 436with respect to the bypass passage with high accuracy, and themeasurement accuracy of the flow rate of the measurement target gas 30can be increased. On the other hand, in a case where the end portion ofthe circuit package 400 fixed to the fixing portion 372 of the housing302 is exposed into the bypass passage when the front cover 303 and therear cover 304 are assembled to the housing 302 to form the bypasspassage on frontside and the bypass passage on backside of the housing302, the measurement target gas 30 flowing through the bypass passageconflicts with the end portion of the circuit package 400 to generatethe vortex of the measurement target gas 30. The vortex is induced tothe downstream side by the measurement target gas 30 flowing through thebypass passage, and reaches the heat transfer surface exposing portion436 of the air flow sensing portion 602 of the circuit package 400depending on a position of the heat transfer surface exposing portion436 of the air flow sensing portion 602. Therefore, there is apossibility to reduce the measurement accuracy of the flow rate.

In addition, as described above, since the cavity portion 382 of theleading end of the circuit package 400 is formed to cover the leadingend side of the circuit package 400 by the mold die when the housing 302is molded, the cross section of the flow path near the circuit package400 becomes large compared to the upstream portion 342 or the downstreamportion 341 of the circuit package 400. Therefore, since a flow velocityof the measurement target gas 30 is reduced in the vicinity of thecircuit package 400, and more specifically the vicinity of the heattransfer surface exposing portion 436 of the air flow sensing portion602, there is a possibility to reduce the measurement accuracy of theflow rate.

FIG. 7(A) is a partially enlarged view illustrating a part of a statewhere the housing of the thermal flow meter and a rear cover isassembled, and FIG. 7(B) is a partially enlarged view illustrating apart of the cross section taken along a line D-D of FIG. 2(B). Further,FIG. 7(A) also illustrates a protrusion 380 formed near the front cover303. In addition, FIG. 8 is an enlarged perspective view illustrating astate of a vicinity of the leading end of the circuit package which isarranged inside the bypass passage.

In the embodiment, as illustrated in the drawings, the front cover 303and the rear cover 304 are made of a material different from the circuitpackage 400 or the housing 302, the protrusion 380 having a hollow 379at the corner of the leading end is formed in the front cover 303, and aprotrusion 381 having a substantially rectangular shape of the crosssection is formed in the rear cover 304. When the front cover 303 andthe rear cover 304 are assembled to the housing 302, a leading end 401of the circuit package 400 separated from the fixing portion 372 iscontained in a concave portion 383 formed by the protrusion 380 of thefront cover 303 and the protrusion 381 of the rear cover 304. In otherwords, the leading end 401 of the circuit package 400 is contained inthe concave portion 383 of a storage portion 384 formed by theprotrusion 380 of the front cover 303 and the protrusion 381 of the rearcover 304.

In addition, as illustrated in FIGS. 7(A) and 8, the protrusions 380 and381 each have a shape extending farther than the leading end 401 of thecircuit package 400 in a flow direction of the measurement target gas30. When the front cover 303 and the rear cover 304 are assembled to thehousing 302, the entire leading end. 401 of the circuit package 400including the corner of the leading end 401 of the circuit package 400is contained in the concave portion 383 over the entire length of theflow direction of the measurement target gas 30.

Further, the leading end 401 of the circuit package 400 is a portionincluding at least a side surface 403 (the end surface of the circuitpackage 100) which connects a front surface 402 having the measurementsurface 430 provided therein and the backside of measurement surface 431disposed on the opposite side in the circuit package 400.

With this configuration, when the circuit package 400 is integrallyfixed to the fixing portion 372 of the housing 302 and the heat transfersurface exposing portion 436 of the air flow sensing portion 602embedded in the circuit package 400 is arranged inside the bypasspassage, the leading end 401 of the circuit package 400 is contained inthe concave portion 383 of the storage portion 384, and the measurementtarget gas 30 flowing through the bypass passage is prevented from beingconflict with the leading end 401 of the circuit package 400. Therefore,it is possible to suppress the vortex of the measurement target gas 30in the leading end 401 of the circuit package 400 even in a case where aforward flow, a pulsatory motion, or a backward flow of the measurementtarget fluid 30 occurs. Further, it is possible to extremely increasethe measurement accuracy of the flow rate of the measurement target gas30.

In addition, when the front cover 303 and the rear cover 304 areassembled to the housing 302, the protrusions 380 and 381 formed in thefront cover 303 and the rear cover 304 are arranged inside the bypasspassage to bury the cavity portion 382 of the leading end side of thecircuit package 400. Therefore, it is possible to reduce the crosssection of flow path near the circuit package 400. Further, since theflow velocity of the measurement target gas 30 is increased in thevicinity of the circuit package 400, and more specifically in thevicinity of the heat transfer surface exposing portion 436 of the airflow sensing portion 602, the measurement accuracy of the flow rate canbe increased.

In particular, in the embodiment, as illustrated in the drawings, sincethe hollow 379 is formed at the corner of the leading end of theprotrusion 380 of the front cover 303 on a side near the circuit package400 and the protrusion 380 is disposed to the vicinity of the frontsurface 402 where the measurement surface 430 of the circuit package 400is provided, it is possible to further reduce the cross section of theflow path near the circuit package 400. Therefore, the measurementaccuracy of the flow rate of the measurement target gas 30 can beincreased still more.

Further, the hollow may be formed at the corner of the leading end ofthe protrusion 381 of the rear cover 304 on a side near the circuitpackage 400. Alternatively, the hollow may be formed in both of theprotrusions 380 and 381 of the front cover 303 and the rear cover 304 tocontain the leading end 401 of the circuit package 400 in the concaveportion formed by these protrusions.

Herein, it is considered that when the housing 302 is released from themold die and is cooled at the time of molding, the circuit package 400is slightly bent according to a difference in a coefficient of thermalexpansion between the front surface 402 where the measurement surface430 of the circuit package 400 is provided and the backside ofmeasurement surface 431, so that the front surface side of the circuitpackage 400 becomes convex and the rear surface side thereof becomesconcave.

In the embodiment, as illustrated in FIG. 7(B), since a gap 404 isprovided between the leading end 401 arranged inside the concave portion383 of the storage portion 384 of the circuit package 400 and the frontsurface of the concave portion 383 of the storage portion 384, theleading end 401 of the circuit package 400 and the concave portion 383are prevented from abutting when the front cover 303 and the rear cover304 are assembled to the housing 302. Further, it is suppressed that anexcessive stress is applied on the heat transfer surface exposingportion 436 (corresponding to a thin diaphragm) of the air flow sensingportion 602.

In addition, when the thermal flow meter 300 is used, even in a casewhere the circuit package 400 is thermally deformed due to heatdissipation of the internal combustion engine, the gap 404 is providedbetween the leading end 401 of the circuit package 400 and the frontsurface of the concave portion. 383 of the storage portion 384, so thatit is possible to prevent the leading end 401 of the circuit package 400and the concave portion 383 from abutting. Therefore, it is possible tosuppress that an excessive stress is applied to the heat transfersurface exposing portion 436 of the air flow sensing portion 602.

In addition, since there is a possibility to have dust or pollutants,moisture, oil, and the like in the measurement target gas 30 flowingthrough the bypass passage, as illustrated in drawing, dust orpollutants, moisture, oil, and the like contained in the measurementtarget gas 30 can be contained in the gap 404 by providing the gap 404between the leading end. 401 of the circuit package 400 and the frontsurface of the concave portion 383 of the storage portion 384. Further,there is an advantage that the circuit package 400 (in particular, theheat transfer surface exposing portion 436 of the air flow sensingportion 602) can be suppressed from being stained due to pollutants,moisture, and the like.

Further, in the embodiment, the protrusion 380 of the front cover 303and the protrusion 381 of the rear cover 304 forming the storage portion384 face each other on the opposite side to the measurement surface 430of the circuit package 400 near the backside of measurement surface 431.Further, there is no facing surface between the members on a side nearthe measurement surface 430 of the circuit package 400 in the concaveportion 303 of the storage portion 384. Therefore, it is possible tosuppress the vortex of the measurement target gas 30 on a side near themeasurement surface 430 of the circuit package 400, and the measurementaccuracy of the flow rate of the measurement target gas 30 can beincreased.

In addition, in the embodiment, as illustrated in FIG. 7(B), the gap 405is provided between the protrusion 380 of the front cover 303 and theprotrusion 381 of the rear cover 304 forming the storage portion 384.Therefore, when the front cover 303 and the rear cover 304 are assembledto the housing 302, it is possible to suppress that the protrusions 380and 381 of the front cover 303 and the rear cover 304 abut on each otherbefore the housing 302 and the front cover 303, and the housing 302 andthe rear cover 304 abut on each other. With this configuration, bothsurfaces of the housing 302 can be reliably sealed by the front cover303 and the rear cover 304, a bypass passage excellent in airtightnesscan be formed, and the measurement accuracy of the flow rate of themeasurement target gas 30 can be increased.

In addition, as described above, in a case where dust or pollutants,moisture, and the like are contained in the gap between the leading end401 of the circuit package 400 and the front surface of the concaveportion 383 of the storage portion 384, dust or pollutants, moisture,and the like can be induced toward an inside wall 373 facing the fixingportion 372 of the bypass passage through a gap 405 between theprotrusion 380 of the front cover 303 and the protrusion 381 of the rearcover 304. Therefore, it is possible to suppress still more that thecircuit package 400 is stained due to dust or pollutants, moisture, andthe like

Furthermore, in the embodiment, as illustrated in FIGS. 7(A) and 7(B),since the storage portion 384 including the protrusion 380 of the frontcover 303 and the protrusion 381 of the rear cover 304 is disposedseparately from the inside wall 373 facing the fixing portion 372 of thebypass passage, it is possible to suppress the protrusion 380 or theprotrusion 381 from interfering with the inside wall 373 when the frontcover 303 and the rear cover 304 are assembled to the housing 302.Therefore, it is possible to improve an assembly performance of thefront cover 303 and the rear cover 304.

In addition, as described above, in a case where dust or pollutants,moisture, and the like are contained in the gap 404 between the leadingend 401 of the circuit package 400 and the front surface of the concaveportion 383 of the storage portion 384, dust or pollutants, moisture,and the like induced toward the inside wall. 373 through the gap 405between the protrusions 380 and 381 of the front cover 303 and the rearcover 304 can be contained in a gap 406 formed by the storage portion384 and the inside wall 373. Therefore, there is an advantage that thecircuit package 400 can be suppressed from being stained due to dust orpollutants, moisture, oil, and the like.

Further, the above description has been made focusing on theconfiguration in which the protrusion 380 of the front cover 303 and theprotrusion 381 of the rear cover 304 are provided to suppress the vortexfrom reaching the heat transfer surface exposing portion 436 of the airflow sensing portion 602, the cavity portion 382 on the leading end sideof the circuit package 400 is buried to contract the flow path near thecircuit package 400 so as to increase the measurement accuracy of theflow rate of the measurement target as 30. On the other hand, in a casewhere there is a stagnation point, or a vortex of the measurement targetgas 30 in the vicinity of the heat transfer surface exposing portion 436provided in the circuit package 400, the flow velocity of themeasurement target gas 30 is reduced, or particles or pollutantscontained in the measurement target gas 30 are deposited on the heattransfer surface exposing portion 436, so that there is a possibility toreduce the measurement accuracy of the flow rate.

In the embodiment, as illustrated in FIG. 8, inclined surfaces 434 and435 are formed to be widened toward the wall surface of the bypasspassage facing the measurement surface 430 in the surrounding area ofthe heat transfer surface exposing portion 436 of the air flow sensingportion 602 in the circuit package 400. Therefore, the measurementtarget gas 30 smoothly flows in the vicinity of the heat transfersurface exposing portion. 436 provided in the circuit package 400, andthe measurement accuracy of the flow rate of the measurement target gas30 is increased.

Specifically, the heat transfer surface exposing portion 436 of the airflow sensing portion 602 is formed in a substantially rectangular shape,the inclined surface 434 is provided in a direction perpendicular to theflow direction of the measurement target gas 30 flowing through thebypass passage, and the inclined surface 435 is provided in a directionalong the flow direction of the measurement target gas 30 flowingthrough the bypass passage. Therefore, the heat transfer surfaceexposing portion 436 of the air flow sensing portion 602 is buriedinside compared to the front surface 402 of the circuit package 400, sothat the vortex generated in the end portion of the circuit package 400is suppressed from reaching the heat transfer surface exposing portion.436 of the air flow sensing portion 602. In addition, since the inclinedsurfaces 434 and 435 are formed in the surrounding area of the heattransfer surface exposing portion 436 of the air flow sensing portion602, the stagnation point or the vortex of the measurement target gas 30is suppressed from being generated in a peripheral edge portion 433 ofthe heat transfer surface exposing portion 436 of the air flow sensingportion 602 (in particular, the corners of the heat transfer surfaceexposing portion 436 of the substantially rectangular shape).

In this embodiment, the measurement target gas 30 dividingly flowsthrough the measurement surface 430 and its rear surface, and the heattransfer surface exposing portion 436 for measuring the flow rate isprovided in one of them. However, the measurement target gas 30 may passthrough only the front surface side of the measurement surface 430instead of dividing the measurement target gas 30 into two passages. Bycurving the bypass passage to follow a second axis across a first axisof the flow direction of the main passage 124, it is possible to gathera foreign object mixed in the measurement target gas 30 to the sidewhere the curve of the second axis is insignificant. By providing themeasurement surface 430 and the heat transfer surface exposing portion436 in the side where the curve of the second axis is significant, it ispossible to reduce influence of a foreign object.

In this embodiment, the measurement surface 430 and the heat transfersurface exposing portion 436 are provided in a link portion between thebypass passage trench on frontside 332 and the bypass passage trench onbackside 334. However, the measurement surface 430 and the heat transfersurface exposing portion 436 may be provided in the bypass passagetrench on frontside 332 or the bypass passage trench on backside 334instead of the link portion between the bypass passage trench onfrontside 332 and the bypass passage trench on backside 334.

An orifice shape is formed in a part of the heat transfer surfaceexposing portion 436 provided in the measurement surface 430 to measurea flow rate (as described below with reference to FIG. 14), so that theflow velocity increases due to the orifice effect, and the measurementaccuracy is improved. In addition, even if a vortex is generated in aflow of the gas in the upstream side of the heat transfer surfaceexposing portion 436, it is possible to eliminate or reduce the vortexusing the orifice and improve measurement accuracy.

Referring to FIGS. 5(A) to 6(B), an outer wall hollow portion 366 isprovided, where the upstream-side outer wall 335 has a hollow shapehollowed to the downstream side in a neck portion of the temperaturedetecting portion 452. Due to this outer wall hollow portion 366, adistance between the temperature detecting portion 452 and the outerwall hollow portion 366 increases, so that it is possible to reduceinfluence of the heat transferred via the upstream-side outer wall 335.

Although the circuit package 400 is enveloped, by the fixing portion 372for fixation of the circuit package 400, it is possible to increase aforce for fixing the circuit package 400 by further fixing the circuitpackage 400 using the outer wall hollow portion 366. The fixing portion372 envelopes the circuit package 400 along a flow axis of themeasurement target gas 30. Meanwhile, the outer wall hollow portion 366envelops the circuit package 400 across the flow axis of the measurementtarget gas 30. That is the circuit package 400 is enveloped such thatthe enveloping direction is different with respect to the fixing portion372. Since the circuit package 400 is enveloped along the two differentdirections, the fixing force is increased. Although the outer wallhollow portion 366 is a part of the upstream-side outer wall 335, thecircuit package 400 may be enveloped in a direction different from thatof the fixing portion 372 using the downstream-side outer wall 336instead of the upstream-side outer wall 335 in order to increase thefixing force. For example, a plate portion of the circuit package 100may be enveloped by the downstream-side outer wall 336, or the circuitpackage 400 may be enveloped using a hollow hollowed owed in theupstream direction or a protrusion protruding to the upstream directionprovided in the downstream-side outer wall 336. Since the outer wallhollow portion 366 is provided in the upstream-side outer wall 335 toenvelop the circuit package 400, it is possible to provide an effect ofincreasing a thermal resistance between the temperature detectingportion 452 and the upstream-side outer wall 335 in addition to fixationof the circuit package 400.

Since the outer wall hollow portion 366 is provided in a neck portion ofthe temperature detecting portion 452, it is possible to reduceinfluence of the heat transferred from the flange 312 or the thermalinsulation 315 through the upstream-side outer wall 335. Furthermore, atemperature measurement hollow 368 formed by a notch between theupstream-side protrusion 317 and the temperature detecting portion 452is provided. Using the temperature measurement hollow 368, it ispossible to reduce heat transfer to the temperature detecting portion452 through the upstream-side protrusion 317. As a result, it ispossible to improve detection accuracy of the temperature detectingportion 452. In particular, since the upstream-side protrusion 317 has alarge cross section, it easily transfers heat, and a functionality ofthe temperature measurement hollow 368 that suppress heat transferbecomes important.

3.2 Another Embodiment of Structure of Bypass Passage and Air FlowSensing Portion

FIGS. 9(A) to 13(B) each illustrate another embodiment of the structureof the bypass passage and the air flow sensing portion. Further, (A) ofeach drawing illustrates the overall of the protrusion 380 formed in thefront cover 303, and (B) of each drawing illustrates the overall of theentire front cover 303.

First, FIGS. 9(A) to 10 illustrate an embodiment in which only thecorner of the leading end 401 of the circuit package 400 is contained inthe concave portion 383 of the storage portion 384 formed by theprotrusion 380 of the front cover 303 and the protrusion 381 of the rearcover 304.

Since the measurement target gas 30 flowing through the bypass passagemostly flows in the right and left direction of FIG. 9(A), it isconsidered that the vortex of the measurement target gas 30 is generatedparticularly in the corner of the leading end 401 of the substantiallyrectangular circuit package 400.

As illustrated in FIGS. 9(A) to 10, since the corner of the leading end401 of the substantially rectangular circuit package 400 are containedin the concave portion 383 of the storage portion 384 formed by theprotrusions 380 and 381, it is possible to effectively suppress thevortex from reaching the heat transfer surface exposing portion 436 ofthe air flow sensing portion 602 of the circuit package 400 whilereducing the protrusion 380 formed in the front cover 303 or theprotrusion 381 formed in the rear cover 304 in size. Therefore, themeasurement accuracy of the flow rate of the measurement target gas 30can be effectively increased.

Further, since the cavity portion 382 is formed between the protrusions380 or the protrusions 381 containing the corners of the leading end 401of the circuit package 400, for example, when the housing 302 is molded,a supporting portion (not illustrated) is extended from the inside wall373 of the bypass passage formed in the housing 302 and the centerportion of the leading end. 401 of the circuit package 400 may besupported by the supporting portion. In addition, the protrusion 380formed in the front cover 303 or the protrusion 381 formed in the rearcover 304 may be formed only on the upstream side of the forward flow ofthe measurement target gas 30 (the left side in FIG. 9(A)) inconsideration of the frequency of occurrence of a forward flow, apulsatory motion, or a backward flow.

Next, FIGS. 11(A) to 12 illustrate an embodiment in which protrusions385 each are formed in the protrusion 380 of the front cover 303 and theprotrusion 381 of the rear cover 304 to protrude toward the heattransfer surface exposing portion 436 of the air flow sensing portion602.

As described above, the cross section of the Flow path of the bypasspassage is made small in the vicinity of the circuit package 400, inparticular, in the vicinity of the heat transfer surface exposingportion 436 of the air flow sensing portion 602 so as to increase theflow velocity of the measurement target gas 30 flowing to the heattransfer surface exposing portion 436 of the air flow sensing portion602. Therefore, it is possible to increase the measurement accuracy ofthe flow rate of the heat transfer surface exposing portion 436 of theair flow sensing portion 602.

As illustrated in FIGS. 11(A) to 12, the protrusion 385 is formed toprotrude toward the heat transfer surface exposing portion 436 of theair flow sensing portion 602 in the front surface on a side near theheat transfer surface exposing portion 436 of the air flow sensingportion 602 of the protrusion 380 of the front cover 303 and theprotrusion 381 of the rear cover 304 containing the leading end 401 ofthe circuit package 400. Thus, since the cross section of the flow pathnear the heat transfer surface exposing portion 436 of the air flowsensing portion 602 is made small, it is possible to increase the flowvelocity of the measurement target gas 30 flowing to the heat transfersurface exposing portion 436 of the air flow sensing portion 602.Therefore, it is possible to effectively increase the measurementaccuracy of the flow rate of the measurement target gas 30. Inparticular, the protrusion 385 is extended in the flow direction of themeasurement target gas 30 from the upstream side of the heat transfersurface exposing portion 436 of the air flow sensing portion 602 to thedownstream side of the heat transfer surface exposing portion 436. Thus,the flow velocity of the measurement target gas 30 flowing to the heattransfer surface exposing portion 436 of the air flow sensing portion602 can be reliably increased in various states such as a forward flow,a pulsatory motion, and a backward flow. Therefore, the measurementaccuracy of the flow rate of the measurement target gas 30 can beeffectively increased still more.

Herein, as illustrated in FIGS. 11(A) and 12, the end surface on theupstream side and the end surface on the downstream side of theprotrusion 385 may be configured by inclined surfaces 395 and 396 inorder to smoothly contract the measurement target gas 30 flowing throughthe bypass passage. In addition, the protrusion 385 is formed in onlythe protrusion 380 of the front cover 303 in order to efficientlycontract only the measurement target gas 30 in the measurement surface430 of the circuit package 400.

Next, FIGS. 13(A) and 13(B) illustrate an embodiment in which abutmentportions 390 abutting on the circuit package 400 are formed in theprotrusion 380 of the front cover 303 and the protrusion 381 of the rearcover 304 containing the leading end 401 of the circuit package 400.

As described with reference to FIG. 7(B), the gap 404 is providedbetween the leading end 401 of the circuit package 400 arranged insidethe concave portion 383 of the storage portion 384 formed by theprotrusions 380 and 381 and the front surface of the concave portion 383of the storage portion 384. Therefore, the leading end 401 of thecircuit package 400 and the concave portion 383 are prevented fromabutting when the front cover 303 and the rear cover 304 are assembledto the housing 302. Further, it is suppressed that an excessive stressis applied to the heat transfer surface exposing portion 436 of the airflow sensing portion 602.

On the other hand, for example, in a case where a vehicle having thethermal flow meter 300 mounted thereon runs on a bad road, a vibrationworking on the thermal flow meter 300 becomes server, and the leadingend 401 of the circuit package 400 vibrates relatively large, so thatthere is a possibility that an excessive stress works on the air flowsensing portion 602 mounted on the circuit package 400. In addition, forexample, in a case where the circuit package 400 is severely deformeddue to the heat dissipation of the internal combustion engine, there isa possibility that the air flow sensing portion 602 mounted on thecircuit package 400 receives a relatively large stress.

As illustrated in FIGS. 13(A) and 13(B), the abutment portions 390 areformed in the concave portion 383 of the storage portion 384 formed bythe protrusions 380 and 381 at a predetermined interval to abut on theleading end 401 of the circuit package 400, the front surface 402 on aside near the measurement surface 430 of the circuit package 400, andthe measurement surface 131 of the circuit package 400. Therefore, it ispossible to allow the movement of the leading end 401 of the circuitpackage 400 arranged inside the concave portion 383 of the storageportion 384 to an acceptable range. Since a stress working on thecircuit package 400 can be suppressed when the thermal flow meter 300 isused, the measurement accuracy of the flow rate of the measurementtarget gas 30 can be maintained for a long time.

Herein, as illustrated in the drawing, the abutment portions 390 may beformed to abut on both of the front surface 402 and the backside ofmeasurement surface 431 in order to support the leading end 401 of thecircuit package 400 from both of the front surface 402 on a side nearthe measurement surface 430 of the circuit package 400 and the backsideof measurement surface 431 of the circuit package 400. Alternatively,the abutment portions may be formed to abut on one of the front surface402 and the backside of measurement surface 431 in consideration of adeforming direction of the circuit package 400 or an assemblyperformance of the front cover 303 and the rear cover 304. In addition,a size or a shape of the abutment portion 390, an interval between theabutment portions 390, and an arrangement in the concave portion 383 maybe appropriately set by a designer.

Furthermore, for example, instead of the abutment portion 390 integrallyformed in the protrusions 380 and 381 of the front cover 303 and therear cover 304, or together with the abutment portion 390, a resinbuffer material (not illustrated) may be arranged inside the concaveportion 383 of the storage portion 384 formed by the protrusions 380 and381. In this case, an optimal buffer material can be selected accordingto a usage condition (a deformation amount) of the thermal flow meter300, the movement of the leading end 401 of the circuit package 400arranged inside the concave portion 383 of the storage portion 384 isappropriately suppressed by the buffer material, so that the stressworking on the circuit package 400 can be appropriately suppressed.

3.3 Structure and Effect of Air Flow Sensing Portion of Bypass Passage

FIG. 14 is a partially enlarged view illustrating a state where themeasurement surface 430 of the circuit package 400 is arranged insidethe bypass passage trench, and a cross-sectional view taken along a lineA-A of FIG. 6. Further, FIG. 14 is a conceptual diagram, in which thedetails are omitted or simplified while the detailed shape isillustrated in FIGS. 5(A) to 6(B), and the details are slightlymodified. The left portion of FIG. 14 is a terminated end portion of thebypass passage trench on backside 334, and the right portion is astarting end portion of the bypass passage trench on frontside 332.Although not illustrated clearly in FIG. 14, penetrating portions areprovided in both the left and right sides of the circuit package 400having the measurement surface 430, and the bypass passage trench onbackside 334 and the bypass passage trench on frontside 332 areconnected to the left and right sides of the circuit package 400 havingthe measurement surface 430.

The measurement target gas 30 that is received from the inlet port 350and flows through the bypass passage on backside including the bypasspassage trench on backside 334 is guided from the left side of FIG. 14.A part of the measurement target gas 30 flows to a flow path 386including the front side of the measurement surface 430 of the circuitpackage 400 and the protrusion 356 provided in the front cover 303through the penetrating portion of the upstream portion 312 of thecircuit package 400. The other measurement target gas 30 flows to a flowpath 387 formed by the backside of measurement surface 431 and the rearcover 304. Then, the measurement target gas 30 flowing through the flowpath 387 moves to the bypass passage trench on frontside 332 through thepenetrating portion of the downstream portion 341 of the circuit package400 and is combined with the measurement target gas 30 flowing throughthe flow path 386, so that it flows through the bypass passage trench onfrontside 332 and is discharged from the outlet port 352 to the mainpassage 124.

Because the bypass passage trench is formed such that the flow path ofthe measurement target gas 30 guided to the flow path 386 through thepenetrating portion of the upstream portion 342 of the circuit package400 from the bypass passage trench on backside 334 is curved wider thanthe flow path guided to the flow path 387, a substance having a heavymass such as a contaminant contained in the measurement target gas 30 isgathered in the flow path 387 being less curved. For this reason, thereis nearly no flow of a foreign object into the flow path 386.

The flow path 386 is structured to form an orifice such that the frontcover 303 is provided successively to the leading end portion of thebypass passage trench on frontside 332, and the protrusion 356 smoothlyprotrudes to the measurement surface 430 side. The measurement surface430 is arranged in one side of the orifice portion of the flow path 386and is provided with the heat transfer surface exposing portion 436 forperforming heat transfer between air flow sensing portion 602 and themeasurement target gas 30. In order to perform measurement of the airflow sensing portion 602 with high accuracy, the measurement target gas30 in the heat transfer surface exposing portion 436 preferably makes alaminar flow having a little vortex. In addition, with the flow velocitybeing faster, the measurement accuracy is more improved. For thisreason, the orifice is formed such that the protrusion 356 provided inthe front cover 303 to face the measurement surface 430 smoothlyprotrudes to the measurement surface 430. This orifice reduces a vortexin the measurement target gas 30 to approximate the flow to a laminarflow. Furthermore, since the flow velocity increases in the orificeportion, and the heat transfer surface exposing portion 436 formeasuring the flow rate is arranged in the orifice portion, themeasurement accuracy of the flow race is improved.

Since the orifice is formed such that the protrusion 356 protrudes tothe inside of the bypass passage trench to face the heat transfersurface exposing portion 436 provided on the measurement surface 430, itis possible to improve measurement accuracy. The protrusion 356 forforming the orifice is provided on the cover facing the heat transfersurface exposing portion 436 provided on the measurement surface 430. InFIG. 14, since the cover facing the heat transfer surface exposingportion 436 provided on the measurement surface 430 is the front cover303, the protrusion 356 is provided in the front cover 303.Alternatively, the protrusion 356 may also be provided in the coverfacing the heat transfer surface exposing portion 436 provided on themeasurement surface 430 of the front or rear cover 303 or 304. Dependingon which of the surfaces the measurement surface 430 and the heattransfer surface exposing portion 436 in the circuit package 400 areprovided, the cover that faces the heat transfer surface exposingportion 436 is changed.

Referring to FIGS. 5(A) to 6(B), a press imprint 412 of the die used inthe resin molding process for the circuit package 400 remains on thebackside of measurement surface 431 as a rear surface of the heattransfer surface exposing portion 436 provided on the measurementsurface 430. The press imprint 442 does not particularly hinder themeasurement of the flow rate and does not make any problem even when thepress imprint 412 remains. In addition, as described below, it isimportant to protect a semiconductor diaphragm of the air flow sensingportion 602 when the circuit package 400 is formed through resinmolding. For this reason, pressing of the rear surface of the heattransfer surface exposing portion 436 is important. Furthermore, it isimportant to prevent resin that covers the circuit package 400 fromflowing to the heat transfer surface exposing portion 436. For thisviewpoint, the inflow of the resin is suppressed by enveloping themeasurement surface 430 including the heat transfer surface exposingportion 436 using a die and pressing the rear surface of the heattransfer surface exposing portion 436 using another die. Since thecircuit package 400 is made through transfer molding, a pressure of theresin is high, and pressing from the rear surface of the heat transfersurface exposing portion 436 is important. In addition, since asemiconductor diaphragm is used in uric air flow sensing portion 602, aventilation passage for a gap created by the semiconductor diaphragm ispreferably formed. In order to hold and fix a plate and the like forforming the ventilation passage, pressing from the rear surface of theheat transfer surface exposing portion 436 is important.

3.4 Shapes and Effects of Front and Rear Covers 303 and 304

FIGS. 15(A) to 15(C) are a diagram illustrating an appearance of thefront cover 303, in which FIG. 15(A) is a left side view, FIG. 15(B) isa front view, and FIG. 15(C) is a plan view. FIGS. 16(A) and 16(B) arediagrams illustrating an appearance of the rear cover 304, in which FIG.16(A) is a left side view, FIG. 16(B) is a front view, and FIG. 16(C) isa plan view.

In FIGS. 15(A) to 16(C), the front cover 303 and the rear cover 304 canbe used to form the bypass passage by closing a part of the bypasspassage trench of the housing 302. In addition, as illustrated in FIGS.15(A) to 15(C), the front cover 303 and the rear cover 304 include theprotrusion 356 which is used to provide an orifice in the flow path. Forthis reason, it is preferable to increase molding accuracy. Since thefront cover 303 and the rear cover 304 are formed through a resinmolding process by injecting a thermoplastic resin into a die, it ispossible to form the front or rear cover 303 or 304 with high moldingaccuracy. In addition, the front cover 303 and the rear cover 304 areprovided with the protrusion 380 having the hollow 379 at the corner ofthe leading end and the protrusion 381 having a substantiallyrectangular shape in cross-sectional view, and are configured to bury agap (a part of the bypass passage) of the cavity portion 382 of theleading end side of the circuit package 400 illustrated in FIGS. 5(B)and 6(B) and cover the leading end portion 401 of the circuit package400 by the concave portion 383 formed by the protrusions 380 and 381when the protrusions 380 and 381 are fit to the housing 302 (see FIGS.7(A) to 8).

The front protection portion 322 or the rear protection portion 325 isformed in the front or rear cover 303 or 304 illustrated in FIGS. 15(A)to 15(C) or FIGS. 16(A) to 16(C). As illustrated in FIG. 2(A), 2(B),3(A), or 3(B), the front protection portion 322 provided in the frontcover 303 is arranged on the front side surface of the inlet port 343,and the rear protection portion 325 provided in the rear cover 304 isarranged in the rear side surface of the inlet port 343. The temperaturedetecting portion 452 arranged inside the inlet port 343 is protected bythe front protection portion 322 and the rear protection portion 325, sothat it is possible to prevent a mechanical damage of the temperaturedetecting portion 452 caused when the temperature detecting portion 452collides with something during production or loading on a vehicle.

The inner side surface of the front cover 303 is provided with theprotrusion 356. As illustrated in FIG. 14, protrusion 356 is arranged toface the measurement surface 430 and has a shape extending along an axisof the flow path of the bypass passage. A cross-sectional shape of theprotrusion 356 is inclined to the downstream side with respect to a topof the protrusion as illustrated in FIG. 15(C). An orifice is formed inthe flow path 386 described above using the measurement surface 430 andthe protrusion 356 so as to reduce a vortex generated in the measurementtarget gas 30 and generate a laminar flow. In this embodiment, thebypass passage having the orifice portion is divided into a trenchportion and a lid portion that covers the trench to form a flow pathhaving an orifice, and the trench portion is formed through a secondresin molding process for forming the housing 302. Then, the front cover303 having the protrusion 356 is formed through another resin moldingprocess, and the trench is covered by using the front cover 303 as a lidof the trench to form the bypass passage. In the second resin moldingprocess for forming the housing 302, the circuit package 400 having themeasurement surface 430 is also fixed to the housing 302. Sinceformation of the trench having such a complicated shape is performedthrough a resin molding process, and a protrusion 356 for the orifice isprovided in the front cover 303, it is possible to form the flow path386 of FIG. 14 with high accuracy. In addition, since an arrangementrelationship between the trench and the measurement surface 430 or theheat transfer surface exposing portion 436 can be maintained with highaccuracy, it is possible to reduce a variation of the product and as aresult obtain a high measurement result. Therefore, it is possible toimprove productivity.

This is similarly applied to formation of the flow path. 387 using therear cover 304 and the backside of measurement surface 431. The flowpath 387 is divided into a trench portion and a lid portion. The trenchportion is formed through a second resin molding process that forms thehousing 302, and the rear cover 304 cover the trench, so as to form theflow path 387. If the flow path 387 is formed in this manner, it ispossible to form the flow path 387 with high accuracy and improveproductivity.

3.5 Structure for Fixing Circuit Package 400 Using Housing 302 andEffects Thereof

Next, fixation of the circuit package 400 to the housing 302 through aresin molding process will be described again with reference to FIGS.5(A) to 6(B). The circuit package 400 is arranged in and fixed to thehousing 302 such that the measurement surface 430 formed on the frontsurface of the circuit package 400 is arranged in a predeterminedposition of the bypass passage trench for forming the bypass passage,for example, a link portion between the bypass passage trench onfrontside 332 and the bypass passage trench on backside 334 in theembodiment of FIGS. 5(A) to 6(B). A portion for burying and fixing thecircuit package 400 into the housing 302 through a resin molding isprovided as a fixing portion 372 for burying and fixing the circuitpackage 400 into the housing 302 in the side slightly closer to theflange 312 from the bypass passage trench. The fixing portion 372 isburied so as to cover the outer circumference of the circuit package 400formed through the first resin molding process.

As illustrated in FIG. 5(B), the circuit package 400 is fixed by thefixing portion 372. The fixing portion (fixation wall) 372 includes acircuit package 400 using a plane having a height adjoining the frontcover 303 and a thin portion 376. By making a resin that covers aportion corresponding to the portion 376 thin, it is possible toalleviate contraction caused when a temperature of the resin is cooledduring formation of the fixing portion 372 and reduce a stressconcentration applied to the circuit package 400. It is possible toobtain better effects if the rear side of the circuit package 400 isformed in the shape described above as illustrated in FIG. 6(B).

The entire surface of the circuit package 400 is not covered by a resinused to form the housing 302, but a portion where the outer wall of thecircuit package 400 is exposed is provided in the flange 312 side of thefixing portion 372. In the embodiment of FIGS. 5(A) to 6(B), the area ofa portion exposed from the resin of the housing 302 but not enveloped,by the housing 302 is larger than the area of a portion enveloped by theresin of the housing 302 out of the outer circumferential surface of thecircuit package 400. Furthermore, a portion of the measurement surface430 of the circuit package 400 is also exposed from the resin of thehousing 302.

Since the circumference of the circuit package 400 is enveloped in thesecond resin molding process for forming the housing 302 by forming apart of the fixing portion 372 that covers the outer wall of the circuitpackage 400 across the entire circumference in a thin band shape, it ispossible to alleviate an excessive stress concentration caused by volumecontraction in the course of solidification of the fixing portion 372.The excessive stress concentration may adversely affect the circuitpackage 400.

In order to more robustly fix the circuit package 400 with a small areaby reducing the area of a portion enveloped by the resin of the housing302 of the outer circumferential surface of the circuit package 400, itis preferable to increase adherence of the circuit package 400 to theouter wall in the fixing portion 372. When a thermoplastic resin is usedto form the housing 302, it is preferable that the thermoplastic resinbe penetrated into fine unevennesses on the outer wall of the circuitpackage 400 while it has low viscosity, and the thermoplastic resin besolidified while it is penetrated into the fine unevennesses of theouter wall. In the resin molding process for forming the housing 302, itis preferable that the inlet port of the thermoplastic resin be providedin the fixing portion 372 and in the vicinity thereof. The viscosity ofthe thermoplastic resin increases as the temperature decreases, so thatit is solidified. Therefore, by flowing the thermoplastic resin having ahigh temperature into the fixing portion 372 or from the vicinitythereof, it is possible to solidify the thermoplastic resin having lowviscosity while it abuts on the outer wall of the circuit package 400.As a result, a temperature decrease of the thermoplastic resin issuppressed, and a low viscosity state is maintained, so that adherencebetween the circuit package 400 and the fixing portion 372 is improved.

By roughening the outer wall surface of the circuit package 400, it ispossible to improve adherence between the circuit package 400 and thefixing portion 372. As a method of roughening the outer wall surface ofthe circuit package 400, there is known a roughening method for formingfine unevennesses on the surface of the circuit package 400, such as asatin-finish treatment, after forming the circuit package 400 throughthe first resin molding process. As the roughening method for formingfine unevennesses on the surface of the circuit package 400, forexample, the roughening may be achieved using sand blasting.Furthermore, the roughening may be achieved through a laser machining.

As another roughening method, an uneven sheet is attached on an innersurface of the die used in the first resin molding process, and theresin is pressed to the die having the sheet on the surface. Even usingthis method, it is possible to form and roughen fine unevennesses on asurface of the circuit package 400. Alternatively, unevennesses may beattached on an inner side of the die for forming the circuit package 400to roughen the surface of the circuit package 400. The surface portionof the circuit package 400 for such roughening is at least a portionwhere the fixing portion 372 is provided. In addition, the adherence isfurther strengthened by roughening a surface portion of the circuitpackage 400 where the outer wall hollow portion 366 is provided.

When the unevenness machining is performed for the surface of thecircuit package 400 using the aforementioned sheet, the depth of thetrench depends on the thickness of the sheet. If the thickness of thesheet increases, the molding of the first resin molding process becomesdifficult, so that the thickness of the sheet has a limitation. If thethickness of the sheet decreases, the depth of the unevenness providedon the sheet in advance has a limitation. For this reason, when theaforementioned sheet is used, it is preferable that the depth of theunevenness between the bottom and the top of the unevenness be set to 10μm or larger and 20 μm or smaller. In the depth smaller than 10 μm, theadherence effect is degraded. The depth larger than 20 μm is difficultto obtain from the aforementioned thickness of the sheet.

In roughening methods other than the aforementioned method of using thesheet, it is preferable to set a thickness of the resin in the firstresin molding process for forming the circuit package 400 to 2 mm orsmaller. For this reason, it is difficult to increase the depth of theunevenness between the bottom and the top of the unevenness to 1 mm orlarger. Conceptually, it is anticipated that adherence between the resinthat covers the circuit package 400 and the resin used to form thehousing 302 increases as the depth of the unevenness between the bottomand the top of the unevenness on the surface of the circuit package 400increases. However, for the reason described above, the depth of theunevenness between the bottom and the top of the unevenness ispreferably set to 1 mm or smaller. That is, if the unevenness having athickness of 10 mm or larger and 1 mm or smaller is provided on thesurface of the circuit package 400, it is preferable to increaseadherence between the resin that covers the circuit package 400 and theresin used to form the housing 302.

A thermal expansion coefficient is different between the thermosettingresin used to form the circuit package 400 and the thermoplastic resinused to form the housing 302 having the fixing portion 372. It ispreferable to prevent an excessive stress generated from this differenceof the thermal expansion coefficient from being applied to the circuitpackage 400.

By forming the fixing portion 372 that envelops the outer circumferenceof the circuit package 400 in a and shape and narrowing the width of theband, it is possible to alleviate a stress caused by a difference of thethermal expansion coefficient applied to the circuit package 400. Awidth of the band of the fixing portion 372 is set to 10 mm or smaller,and preferably 8 mm or smaller. In this embodiment, since the outer wallhollow portion 366 as a part of the upstream-side outer wall 335 of thehousing 302 as well as the fixing portion 372 envelops the circuitpackage 400 to fix the circuit package 400, it is possible to furtherreduce the width of the band of the fixing portion 372. The circuitpackage 400 can be fixed, for example, if the width is set to 3 mm orlarger.

In order to reduce a stress caused by the difference of the thermalexpansion coefficient, a portion covered by the resin used to form thehousing 302 and an exposed portion without covering are provided on thesurface of the circuit package 400. A plurality of portions where thesurface of the circuit package 400 is exposed from the resin of thehousing 302 are provided, and one of them is to the measurement surface430 having the heat transfer surface exposing portion 436 describedabove. In addition, a portion exposed to a part of the flange 312 siderelative to the fixing portion 372 is provided. Furthermore, the outerwall hollow portion 366 is formed to expose a portion of the upstreamside relative to the outer wall hollow portion 366, and this exposedportion serves as a support portion that supports the temperaturedetecting portion 452. A gap is formed such that a portion of the outersurface of the circuit package 400 in the flange 312 side relative tothe fixing portion 372 surrounds the circuit package 400 across itsouter circumference, particularly, the side facing the flange 312 fromthe downstream side of the circuit package 400 and further across theupstream side of the portion close to the terminal of the circuitpackage 400. Since the gap is formed around the portion where thesurface of the circuit package 400 is exposed, it is possible to reducethe heat amount transferred to the circuit package 400 through theflange 312 from the main passage 124 and suppress degradation ofmeasurement accuracy caused by the heat.

A gap is formed between the circuit package 100 and the flange 312, andthis gap serves as a terminal connector 320. The connection terminal 412of the circuit package 400 and the inner socket of external terminal 361positioned in the housing 302 side of the external terminal 306 areelectrically connected to each other using this terminal connector 320through spot welding, laser welding, and the like. The gap of theterminal connector 320 can suppress heat transfer from the housing 302to the circuit package 400 as described above and is provided as a spacethat can be used to perform a connection work between the connectionterminal 412 of the circuit package 400 and the inner socket of externalterminal 361 of the external terminal 306.

3.6 Formation of Housing 302 Through Second Resin Molding Process andEffects Thereof

In the housing 302 illustrated in FIGS. 5(A) to 6(B) described above,the circuit package 400 having the air flow sensing portion 602 or theprocessing unit 604 is manufactured through the first resin moldingprocess. Then, the housing 302 having, for example, the bypass passagetrench on frontside 332 or the bypass passage trench on backside 334 forforming the bypass passage where the measurement target gas 30 flows aremanufactured through the second resin molding process. Through thissecond resin molding process, the circuit package 400 is embedded intothe resin of the housing 302 and is fixed to the inside of the housing302 through resin molding. As a result, the air flow sensing portion 602performs heat transfer with the measurement target gas 30, so that aconfiguration relationship such as a positional relationship or adirectional relationship between the heat transfer surface exposingportion 436 for measuring the flow rate and the bypass passageincluding, for example, the bypass passage trench on frontside 332 orthe bypass passage trench on backside 334 can be maintained withremarkably high accuracy. In addition, it is possible to suppress anerror or deviation generated in each circuit package 400 to a very smallvalue. As a result, it is possible to remarkably improve measurementaccuracy of the circuit package 400. For example, compared to aconventional method in which fixation is performed using an adhesive, itis possible to improve measurement accuracy twice or more. Since thethermal flow meter 300 is typically manufactured in large quantities,the method of using an adhesive along with strict measurement has alimitation in improvement of measurement accuracy. However, if thecircuit package 400 is manufactured through the first resin moldingprocess as in this embodiment, and the bypass passage is then formed inthe second resin molding process for forming the bypass passage wherethe measurement target gas 30 flows while the circuit package 400 andthe bypass passage are fixed, it is possible to remarkably reduce avariation of the measurement accuracy and remarkably improve themeasurement accuracy of each thermal flow meter 300. This similarlyapplies to the embodiment of FIG. 14 as well as the embodiment of FIG.5(A), 5(B), 6(A), or 6(B).

For example, making a detailed explanation referring to the embodimentillustrated in FIG. 5(A), 5(B), 6(A), or 6(B), it is possible to fix thecircuit package 400 to the housing 302 such that a relation between thebypass passage trench on frontside 332, the bypass passage trench onbackside 334, and the heat transfer surface exposing portion 436 is setto a specific relation. As a result, in each of the thermal flow meters300 produced in large quantities, a positional relation or aconfiguration relation between the heat transfer surface exposingportion 436 of each circuit package 400 and the bypass passage can beregularly obtained with remarkably high accuracy. Since the bypasspassage trench where the heat transfer surface exposing portion. 436 ofthe circuit package 400 is fixed (for example, the bypass passage trenchon frontside 332 and the bypass passage trench on backside 334) can beformed with remarkably high accuracy, a work of forming she bypasspassage in this bypass passage trench is a work of covering both sidesof the housing 302 using the front cover 303 and the rear cover 304. Asillustrated in FIGS. 15(A) to 15(C) or FIGS. 16(A) to 16(C), even thoughthe protrusions 380 and 381 are provided in the front cover 303 and therear cover 304, the gap is provided between the protrusions 380 and 381,so that the protrusions 330 and 381 do not interfere with each otherwhen both surfaces of the housing 302 is covered by the front cover 303and the rear cover 304. This work is very simple and is a work processhaving a few factors of degrading the measurement accuracy. In addition,the front or rear cover 303 or 304 is produced through a resin moldingprocess having high formation accuracy. Therefore, it is possible toform the bypass passage provided in a specific relation with the heattransfer surface exposing portion 436 of the circuit package 400 withhigh accuracy. In this manner, it is possible to obtain highproductivity in addition to improvement of measurement accuracy.

In comparison, in the related art, the thermal flow meter was producedby fabricating the bypass passage and then bonding the measuring portionto the bypass passage using an adhesive. Such a method of using anadhesive is disadvantageous because a thickness of the adhesive isirregular, and a position or angle of the adhesive is different in eachproduct. For this reason, there was a limitation in improvement of themeasurement accuracy. If this work is performed in mass production, itis further difficult to improve the measurement accuracy.

In the embodiment according to the invention, first, the circuit package400 having the air flow sensing portion 602 is produced through a firstresin molding process, and the circuit package 400 is then fixed throughresin molding while the bypass passage trench for forming the bypasspassage through resin molding is formed through a second resin moldingprocess. As a result, it is possible to form the shape of the bypasspassage trench and fix the air flow sensing portion 602 to the bypasspassage trench with significantly high accuracy.

A portion relating to the measurement of the flow rate, such as the heattransfer surface exposing portion 436 of the air flow sensing portion602 or the measurement surface 430 installed in the heat transfersurface exposing portion 436, is formed on the surface of the circuitpackage 400. Then, the measurement surface 430 and the heat transfersurface exposing portion 436 are exposed from the resin used to form thehousing 302. That is, the heat transfer surface exposing portion 436 andthe measurement surface 430 around the heat transfer surface exposingportion 436 are not covered by the resin used to form, the housing 302.The measurement surface 430 formed through the resin molding of thecircuit package 400, the heat transfer surface exposing portion 436, orthe temperature detecting portion 452 is directly used even after theresin molding of the housing 302 to measure a flow rate of the thermalflow meter 300 or a temperature. As a result, the measurement accuracyis improved.

In the embodiment according to the invention, the circuit package 400 isintegratedly formed with the housing 302 to fix the circuit package 400to the housing 302 having the bypass passage. Therefore, it is possibleto fix the circuit package 400 to the housing 302 with a small fixationarea. That is, it is possible to increase one surface area of thecircuit package 400 that does not make contact with the housing 302. Thesurface of the circuit package 400 that does not make contact with thehousing 302 is exposed to, for example, a gap. The heat of the intakepipe is transferred to the housing 302 and is then transferred from thehousing 302 to the circuit package 400. Even if the contact area betweenthe housing 302 and the circuit package 400 is reduced instead ofenveloping the entire surface or most of the surface of the circuitpackage 400 with the housing 302, it is possible to maintain highreliability with high accuracy and fix the circuit package 400 to thehousing 302. For this reason, it is possible to suppress heat transferfrom the housing 302 to the circuit package 400 and suppress a decreaseof the measurement accuracy.

In the embodiment illustrated in FIG. 5(A), 5(B), 6(A), or 6(B), thearea A of the exposed surface of the circuit package 400 can be set tobe equal to or larger than the area B covered by a molding material usedto form the housing 302. In the embodiment, the area A is larger thanthe area B. As a result, it is possible to suppress heat transfer fromthe housing 302 to the circuit package 400. In addition, it is possibleto reduce a stress generated by a difference between a thermal expansioncoefficient of the thermosetting resin used to form the circuit, package400 and a thermal expansion coefficient of the thermoplastic resin usedto form the housing 302.

4. Appearance of Circuit Package 400

4.1 Formation of Measurement Surface 430 Having Heat Transfer SurfaceExposing Portion 436

FIGS. 17(A) to 17(C) illustrate an appearance of the circuit package 400formed through the first resin molding process. It is noted that thehatching portion in the appearance of the circuit package 400 indicatesa fixation surface 432 where the circuit package 400 is covered by theresin used in the second resin molding process when the housing 302 isformed through the second resin molding process after the circuitpackage 400 is manufactured through the first resin molding process.FIG. 17(A) is a left side view illustrating the circuit package 400,FIG. 17(B) is a front view illustrating the circuit package 400, and theFIG. 17(C) is a rear view illustrating the circuit package 400. Thecircuit package 400 is embedded with the air flow sensing portion 602 orthe processing unit 604 described below, and they are integratedlymolded using a thermosetting resin. Further, a portion including the airflow sensing portion 602 becomes a passage 605 which is arranged insidethe bypass passage.

On the surface of the circuit package 400 of FIG. 17(B) the measurementsurface 430 serving as a plane for flowing the measurement target gas 30is formed in a shape extending in a flow direction of the measurementtarget gas 30. In this embodiment, the measurement surface 430 has arectangular shape extending in the flow direction of the measurementtarget gas 30. The measurement surface 430 is formed to be thinner thanother portions as illustrated in FIG. 17(A), and a part thereof isprovided with the heat transfer surface exposing portion 436. Theembedded air flow sensing portion 602 performs heat transfer to themeasurement target gas 30 through the heat transfer surface exposingportion 436 to measure a condition of the measurement target gas 30 suchas a flow velocity of the measurement target gas 30 and output anelectric signal representing the flow rate of the main passage 124.

In order to measure a condition of the measurement target gas 30 withhigh accuracy using the embedded air flow sensing portion 602 (refer toFIG. 21), the gas flowing through the vicinity of the heat transfersurface exposing portion 136 preferably makes a laminar flow having alittle vortex. For this reason, it is preferable that there be no heightdifference between the flow path side surface of the heat transfersurface exposing portion 436 and the plane of the measurement surface430 that guides the gas. In this configuration, it is possible tosuppress an irregular stress or a distortion from being applied to theair flow sensing portion 602 while maintaining high flow ratemeasurement accuracy. It is noted that the aforementioned heightdifference may be provided if it does not affect the flow ratemeasurement accuracy.

On the rear surface of the measurement surface 430 of the heat transfersurface exposing portion 436, a press imprint 442 of the die thatsupports an internal substrate or plate during the resin molding of thecircuit package 400 remains as illustrated in FIG. 17(C). The neattransfer surface exposing portion 436 is used to perform heat exchangewith the measurement target gas 30. In order to accurately measure acondition of the measurement target gas 30, it is preferable toappropriately perform heat transfer between the air flow sensing portion602 and the measurement target gas 30. For this reason, it is necessaryto avoid a part of the heat transfer surface exposing portion 436 frombeing covered by the resin in the first resin molding process. Dies areinstalled in both the heat transfer surface exposing portion 136 and thebackside of measurement surface 431 as a rear surface thereof, and aninflow of the resin to the heat transfer surface exposing portion 436 isprevented using this die. A press imprint 442 having a concave shape isformed on the rear surface of the heat transfer surface exposing portion436. In this portion, it is preferable to arrange a device serving asthe air flow sensing portion 602 or the like in the vicinity todischarge the heat generated from the device to the outside as much aspossible. The formed concave portion is less influenced by the resin andeasily discharges heat.

A semiconductor diaphragm corresponding to the heat transfer surfaceexposing portion 436 is formed in an air flow sensing portion (air flowsensing element) 602 including a semiconductor device. The semiconductordiaphragm can be obtained by forming a gap on the rear surface of theair flow sensing element 602. If the gap is covered, the semiconductordiaphragm is deformed, and the measurement accuracy is degraded due to achange of the pressure inside the gap caused by a change of thetemperature. For this reason, in this embodiment, an opening 438communicating with the gap of the rear surface of the semiconductordiaphragm is provided on the front surface of the circuit package 400,and a link channel for linking the gap of the rear surface of thesemiconductor diaphragm and the opening 438 is provided inside thecircuit package 400. It is noted that the opening 438 is provided in theportion not hatched in FIGS. 17(A) to 17(C) in order to prevent theopening 438 from being covered by the resin through the second resinmolding process.

It is necessary to form the opening 438 through the first resin moldingprocess while an inflow of the resin to the portion of the opening 438is suppressed by matching dies to both a portion of the opening 438 anda rear surface thereof and pressing the dies. Formation of the opening438 and the link channel that connects the gap on the rear surface ofthe semiconductor diaphragm and the opening 438 will be described below.

4.2 Formation of Temperature Detecting Portion 452 and Protrusion 424and Effects Thereof

The temperature detecting portion 452 provided in the circuit package400 is also provided in the leading end of the protrusion 424 extendingin the upstream direction of the measurement target gas 30 in order tosupport the temperature detecting portion 452 and also has a function ofdetecting a temperature of the measurement target gas 30. In order todetect a temperature of the measurement target as 30 with high accuracy,it is preferable to reduce heat transfer to portions other than themeasurement target gas 30 as much as possible. The protrusion 424 thatsupports the temperature detecting portion. 452 has a shape having aleading end thinner than the base thereof and is provided with thetemperature detecting portion 452 in its leading end portion. Because ofsuch a shape, it is possible to reduce influence of the heat from theneck portion of the protrusion 424 to the temperature detecting portion452.

After the temperature of the measurement target gas 30 is detected usingthe temperature detecting portion 452, the measurement target as 30flows along the protrusion 424 to approximate the temperature of theprotrusion 424 to the temperature of the measurement target gas 30. As aresult, it is possible to suppress influence of the temperature of theneck portion of the protrusion 424 to the temperature detecting portion452. In particular, in this embodiment, the temperature detectingportion 452 is thinner in the vicinity of the protrusion 424 having thetemperature detecting portion 452 and is thickened toward the neck ofthe protrusion 424. For this reason, the measurement target gas 30 flowsalong the shape of the protrusion 424 to efficiently cool the protrusion424.

The hatching portion of the neck portion of the protrusion 424 is afixation surface 432 covered by the resin used to form the housing 302in the second resin molding process. A hollow is provided in thehatching portion of the neck portion of the protrusion 424. This showsthat a portion of the hollow shape not covered by the resin of thehousing 302 is provided. If such a portion having a hollow shape notcovered by the resin of the housing 302 in the neck portion of theprotrusion 424 is provided in this manner, it is possible to furthereasily cool the protrusion 424 using the measurement target gas 30.

4.3 Terminal of Circuit Package 400

The circuit package 400 is provided with the connection terminal 412 inorder to supply electric power for operating the embedded air flowsensing portion 602 or the processing unit. 604 and output the flow ratemeasurement value or the temperature measurement value. In addition, aterminal 414 is provided in order to inspect whether or not the circuitpackage 400 is appropriately operated, or whether or not an abnormalityis generated in a circuit component or connection thereof. In thisembodiment, the circuit package 400 is formed by performing transfermolding for the air flow sensing portion. 602 or the processing unit 604using a thermosetting resin through the first resin molding process. Byperforming the transfer molding, it is possible to improve dimensionalaccuracy of the circuit package 400. However, in the transfer moldingprocess, since a high pressure resin is pressed into the inside of thesealed die where the air flow sensing portion 602 or the processing unit604 is embedded, it is preferable to inspect whether or not there is adefect in the air flow sensing portion 602 or the processing unit 604and such a wiring relationship for the obtained circuit package 400 inthis embodiment, an inspection terminal 414 is provided, and inspectionis performed for each of the produced circuit packages 400. Since theinspection terminal 414 is not used for measurement, the terminal 414 isnot connected to the inner socket of external terminal 361 as describedabove. In addition, each connection terminal 412 is provided with acurved portion 416 in order to increase a mechanical elastic force. If amechanical elastic force is provided in each connection terminal 412, itis possible to absorb a stress caused by a difference of the thermalexpansion coefficient between the resin of the first resin moldingprocess and the resin of the second resin molding process. That is, eachconnection terminal 412 is influenced by thermal expansion caused by thefirst resin molding process, and the inner socket of external terminal361 connected to each connection terminal 412 are influenced by theresin of the second resin molding process. Therefore, it is possible toabsorb generation of a stress caused by the difference of the resin.

4.4 Fixation of Circuit Package 400 Through Second Resin Molding Processand Effects Thereof

In FIGS. 17(A) to 17(C), the hatching portion indicates a fixationsurface 432 for covering the circuit package 400 using the thermoplasticresin used in the second resin molding process to fix the circuitpackage 400 to the housing 302 in the second resin molding process. Asdescribed above in relation to FIG. 5(A), 5(B), 6(A), or 6(B), it isimportant to maintain high accuracy to provide a specific relationshipbetween the measurement surface 430, the heat transfer surface exposingportion 436 provided in the measurement surface 430, and the shape ofthe bypass passage. In the second resin molding process, the bypasspassage is formed, and the circuit package 400 is fixed to the housing302 that forms the bypass passage. Therefore, it is possible to maintaina relationship between the bypass passage, the measurement surface 430,and the heat transfer surface exposing portion 436 with significantlyhigh accuracy. That is, since the circuit package 400 is fixed to thehousing 302 in the second resin molding process, it is possible toposition and fix the circuit package 400 into the die used to form thehousing 302 having the bypass passage with high accuracy. By injecting athermoplastic resin having a high temperature into this die, the bypasspassage is formed with high accuracy, and the circuit package 400 isfixed with high accuracy.

In this embodiment, the entire surface of the circuit package 400 is nota fixation surface 432 covered by the resin used to form the housing302, but the front surface is exposed so the connection terminal 412side of the circuit package 400. That is, a portion not covered by theresin used to form the housing 302 is provided. In the embodimentillustrated in FIGS. 17(A) to 17(C), out of the front surface of thecircuit package 400, the area that is not enveloped by the resin used toform the housing 302 but is exposed from the resin used to form thehousing 302 is larger than the area of the fixation surface 432enveloped by the resin used to form the housing 302.

A thermal expansion coefficient is different between the thermosettingresin used to form the circuit package 400 and the thermoplastic resinused to form the housing 302 having the fixing portion 372. It ispreferable to prevent a stress caused by this difference of the thermalexpansion coefficient from being applied to the circuit package 400 aslong as possible. By reducing the front surface of the circuit package400 and the fixation surface 432, it is possible to reduce influencebased on the difference of the thermal expansion coefficient. Forexample, it is possible to reduce the fixation surface 432 on the frontsurface of the circuit package 400 by providing a band shape having awidth L.

It is possible to increase a mechanical strength of the protrusion 424by providing the fixation surface 432 in the base of the protrusion 424.It is possible to more robustly fix the circuit package 400 and thehousing 302 to each other by providing, on the front surface of thecircuit package 400, a band-shaped fixation surface along a flow axis ofthe measurement target gas 30 and a fixation surface across the flowaxis of the measurement target gas 30. On the fixation surface 432, aportion surrounding the circuit package 400 in a band shape having awidth L along the measurement surface 430 is the fixation surface alongthe flow axis of the measurement target gas 30 described above, and aportion that covers the base of the protrusion 424 is the fixationsurface across the flow axis of the measurement target gas 30.

5. Mounting of Circuit Components onto Circuit Package

FIG. 18 is an explanatory diagram for describing a communication hole676 that connects a gap 674 provided inside the diaphragm. 672 and theair flow sensing portion (flow rate detecting element) 602 and the hole520.

As described below, the air flow sensing portion 602 for measuring theflow rate of the measurement target gas 30 is provided with a diaphragm672, and a gap 674 is provided on the rear surface of the diaphragm 672.Although not illustrated, the diaphragm 672 is provided with an elementfor exchanging heat with the measurement target gas 30 and measuring theflow rate thereby. If the heat is transferred to the elements formed inthe diaphragm 672 through the diaphragm 672 separately from the heatexchange with the measurement target gas 30, it is difficult toaccurately measure the flow rate. For this reason, it is necessary toincrease a thermal resistance of the diaphragm 672 and form thediaphragm 672 as thin as possible.

The air flow sensing portion (air flow sensing element) 602 is buriedand fixed into the first resin of the circuit package 400 formed throughthe first resin molding process such that the heat transfer surface 437of the diaphragm 672 is exposed. The surface of the diaphragm 672 isprovided with the elements (not illustrated) described above (such as aheat generator 608, resistors 652 and 654 as an upstream resistancetemperature detector, and resistors 656 and 658 as a downstreamresistance temperature detector illustrated in FIG. 22). The elementsperform heat transfer with the measurement target gas 30 (notillustrated) through the heat transfer surface 437 on the surface of theelements in the heat transfer surface exposing portion 436 correspondingto the diaphragm 672. The heat transfer surface 437 may be provided onthe surface of each element or may be provided with a thin protectionfilm thereon. It is preferable that heat transfer between the elementsand the measurement target gas 30 be smoothly performed, and direct heattransfers between the elements should be reduced as much as possible.

A portion of the air flow sensing portion (air flow sensing element) 602where the elements are provided is arranged in the heat transfer surfaceexposing portion 436 of the measurement surface 430, and the heattransfer surface 437 is exposed from the resin used to form themeasurement surface 430. The outer circumference of the air flow sensingelement 602 is covered by the thermosetting resin used in the firstresin molding process for forming the measurement surface 430. If onlythe side face of the air flow sensing element 602 is covered by thethermosetting resin, and the surface side of the outer circumference ofthe air flow sensing element 602 (that is, the area around the diaphragm672) is not covered by the thermosetting resin, a stress generated inthe resin used to form the measurement surface 430 is received only bythe side face of the air flow sensing element 602, so that a distortionmay generated in the diaphragm 672, and characteristics may bedeteriorated. The distortion of the diaphragm 672 is reduced by coveringthe outer circumference portion of the air flow sensing element 602 withthe thermosetting resin as illustrated in FIG. 18. Meanwhile, if aheight difference between the heat transfer surface 437 and themeasurement surface 430 where the measurement target gas 30 flows islarge, the flow of the measurement target gas 30 is disturbed, so thatmeasurement accuracy is degraded. Therefore, it is preferable that aheight difference W between the heat transfer surface 437 and themeasurement surface 430 where the measurement target gas 30 flows besmall.

The diaphragm 672 is formed thin in order to suppress heat transferbetween each element, and the thin is obtained by forming a gap 674 inthe rear surface of the air flow sensing element 602. If this cap 674 issealed, a pressure of the cap 674 formed on the rear surface of thediaphragm 672 changes depending on a temperature change. As a pressuredifference between the gap 674 and the surface of the diaphragm. 672increases, the diaphragm 672 receives the pressure, and a distortion isgenerated, so that high accuracy measurement becomes difficult. For thisreason, a hole 520 connected to the opening 438 opened to the outside isprovided in the plate 532, and a communication hole 676 that connectsthis hole 520 and the gap 674 is provided. This communication hole 676consists of, for example, a pair of plates including first and secondplates 532 and 536. A first plate 532 is provided with holes 520 and 521and a trench for forming the communication hole 676. The communicationhole 676 is formed by covering the trench and the holes 520 and 521 withthe second plate 536. Using the communication hole 676 and the hole 520,the pressures applied to the front and rear surfaces of the diaphragm672 becomes approximately equal, so that the measurement accuracy isimproved.

As described above, the communication hole 676 can be formed by coveringthe trench and the holes 520 and 521 with the second plate 536.Alternatively, the lead frame may be used as second plate 536. Asdescribed in relation to FIGS. 15(A) to 15(C), the diaphragm 672 and theLSI circuit serving as the processing unit 604 are provided on the plate532. A lead frame for supporting the plate 532 where the diaphragm. 672and the processing unit 604 are mounted is provided thereunder.Therefore, using the lead frame, the structure becomes simpler. Inaddition, the lead frame may be used as a ground electrode. If the leadframe serves as the second plate 536, and the communication hole 676 isformed by covering the holes 520 and 521 formed in the first plate 532using the lead frame and covering the trench formed in the first plate532 using the lead frame in this manner, it is possible to simplify theentire structure. In addition, it is possible to reduce influence ofnoise from the outside of the diaphragm 672 and the processing unit 604because the lead frame serves as a ground electrode.

In the circuit package 400, the press imprint 442 remains on the rearsurface of the circuit package 400 where the heat transfer surfaceexposing portion 436 is formed. In the first resin molding process, inorder to prevent an inflow of the resin no the heat transfer surfaceexposing portion 436, a die such as an insertion die is installed in aportion of the heat transfer surface exposing portion 436, and a die isinstalled in a portion of the press imprint 442 opposite thereto, sothat an inflow of the resin to the heat transfer surface exposingportion 436 is suppressed. By forming a portion of the heat transfersurface exposing portion 436 in this manner, it is possible to measurethe flow rate of the measurement target as 30 with significantly highaccuracy.

Further, the inclined surfaces 434 and 435 are provided in thesurrounding area of the heat transfer surface exposing portion 436provided in the measurement surface 430, and the heat transfer surfaceexposing portion 436 is arranged to be buried in the circuit package 400compared to the measurement surface 430 to which the measurement targetgas 30 flows.

6. Process of Producing Thermal Flow Meter 300

6.1 Process of Producing Circuit Package 400

FIGS. 19 and 20 illustrate a process of producing the thermal flow meter300, in which FIG. 19 illustrates a process of producing the circuitpackage 400 and FIG. 20 illustrates a process of producing the thermalflow meter. In FIG. 19, step 1 shows a process of producing a frame.This frame is formed, for example, through press machining.

In step 2, the plate 532 is first mounted on the frame obtained throughthe step 1, and the air flow sensing portion 602 or the processing unit604 is further mounted on the plate 532. Then, the temperature detectionelement and the circuit component such as a chip capacitor are mounted.In step 2, electrical wiring is performed between circuit components,between the circuit component and the lead, and between the leads. Instep 2, the circuit component is mounted on the frame, and theelectrical wiring is further performed, so that an electric circuit isformed.

Then, in step 3, through the first resin molding process, molding usinga thermosetting resin is performed. In addition, in step 3, each of theconnected leads is separated from the frame, and the leads are separatedfrom each other, so that the circuit package 400 of FIGS. 17(A) to 17(C)is obtained. In this circuit package 400, as illustrated in FIGS. 17(A)to 17(C) the measurement surface 430 or the heat transfer surfaceexposing portion 436 is formed.

In step 4, a visual inspection an operational inspection is performedfor the obtained circuit package 400. In the first resin molding processof step 3, the electric circuit obtained in step 2 is fixed to theinside of the die, and a high temperature resin is injected into the diewith a high pressure. Therefore, it is preferable to inspect whether ornot there is an abnormality in the electric component or the electricwiring. For this inspection, the terminal 414 is used in addition to theconnection terminal 412 of FIGS. 17(A) to 17(C). It is noted that, sincethe terminal 414 is not used thereafter, it may be cut out from the baseafter this inspection.

6.2 Process of Producing Thermal Flow Meter 300 and Calibration ofCharacteristics

In the process of FIG. 20, the circuit package 400 produced asillustrated in FIG. 19 and the external terminal 306 are used. In step5, the housing 302 is formed through the second resin molding process.In this housing 302, a bypass passage trench formed of resin, the flange312, or the external, connector 305 are formed, and the hatching portionof the circuit package 400 illustrated in FIGS. 17(A) to 17(C) iscovered by the resin in the second resin molding process, so that thecircuit package 400 is fixed to the housing 302. By combining theproduction (step 3) of the circuit package 400 through the first resinmolding process and the formation of the housing 302 of the thermal flowmeter 300 through the second resin molding process, the air flow sensingaccuracy is remarkably improved. In step 6, each inner socket ofexternal terminal 361 of FIGS. 5(A) to 6(B) is separated. In step 7, theconnection terminal 412 and the inner socket of external terminal 361are connected.

The housing 302 is obtained in step 7. Then, in step 8, the front cover303 and the rear cover 304 are installed in the housing 302, so that theinside of the housing 302 is sealed with the front and rear covers 303and 304, and the bypass passage through which the measurement target gas30 flows is obtained. At this time, the gap of the cavity portion 382 ofthe leading end side of the circuit package 400 is buried by theprotrusion 380 of the front cover 303 and the protrusion 381 of the rearcover 304, the leading end 401 of the circuit package 400 is containedin the concave portion 383 formed by the protrusions 380 and 381. Inaddition, an orifice structure described in relation to FIG. 14 isformed by the protrusion 356 provided in the front cover 303 or the rearcover 304, and disposed at a position defined with respect to thepackage 400. It is noted that the front cover 303 is formed through themolding of step 10, and the rear cover 304 is formed through the moldingof step 11, in addition, the front and rear covers 303 and 304 areformed through separate processes using different dies.

In step 9, a characteristic to is performed by guiding the air to thebypass passage in practice. Since a relationship between the bypasspassage and the air flow sensing portion is maintained with highaccuracy as described above, significantly high measurement accuracy isobtained by performing a characteristic calibration through acharacteristic test. In addition, since the molding is performed with apositioning or configuration relationship between the bypass passage andthe air flow sensing portion is determined through the first resinmolding process and the second resin molding process, the characteristicdoes not change much even in a long time use, and high reliability isobtained in addition to the high accuracy.

7. Circuit Configuration of Thermal Flow Meter 300

7.1 Entire Circuit Configuration of Thermal Flow Meter 300

FIG. 21 is a circuit diagram illustrating the air flow sensing circuit601 of the thermal flowmeter 300. It is rioted that the measurementcircuit relating to the temperature detecting portion 452 described inthe aforementioned embodiment is also provided in the thermal flow meter300, but is not illustrated intentionally in FIG. 21.

The air flow sensing circuit 601 of the thermal flowmeter 300 includesthe air flow sensing portion. 602 having the heat generator 608 and theprocessing unit 604. The processing unit 604 control a heat amount ofthe heat generator 608 of she air flow sensing portion 602 and outputs asignal representing the flow rate through the terminal 662 based on theoutput of the air flow sensing portion 602. For this processing, theprocessing unit 604 includes a central processing unit (hereinafter,referred to as “CPU”) 612, an input circuit 614, an output circuit 616,a memory 618 for storing data representing a relationship between thecalibration value or the measurement value and the flow rate, and apower circuit 622 for supplying a certain voltage to each necessarycircuit. The power circuit 622 is supplied with DC power from anexternal power supply such as a vehicle-mount battery through aterminal. 664 and a ground terminal (not illustrated).

The air flow sensing portion 602 is provided with a heat generator 608for heating the measurement target gas 30. A voltage V1 is supplied fromthe power circuit 622 to a collector of a transistor 606 included in acurrent supply circuit of the heat generator 608, and a control signalis applied from the CPU 612 to a base of the transistor 606 through theoutput circuit 616. Based on this control signal, a current is suppliedfrom the transistor 606 to the heat generator 608 through the terminal624. The current amount supplied to the heat generator 608 is controlledby a control signal applied from the CPU 612 to the transistor 606 ofthe current supply circuit of the heat generator 608 through the outputcircuit 616. The processing unit 604 controls the heat amount of theheat generator 608 such that a temperature of the measurement target as30 increases by a predetermined temperature, for example, 100° C. froman initial temperature by heating using the heat generator 608.

The air flow sensing portion 602 includes a heating control bridge 640for controlling a heat amount of the heat generator 608 and a bridgecircuit of air flow sensing 650 for measuring a flow rate. Apredetermined voltage V3 is supplied to one end of the heating controlbridge 640 from the power circuit 622 through the terminal 626, and theother end of the heating control bridge 640 is connected to the groundterminal 630. In addition, a predetermined voltage V2 is applied, to oneend of the bridge circuit of air flow sensing 650 from the power circuit622 through the terminal 625, and the other end of the bridge circuit ofair flow sensing 650 is connected to the ground terminal 630.

The heating control bridge 640 has a resistor 642 which is a resistancetemperature detector having a resistance value changing depending on thetemperature of the heated measurement target gas 30, and the resistors642, 644, 646, and 648 constitute a bridge circuit. A potentialdifference between a node A between the resistors 642 and 646 and a nodeB between the resistors 644 and 648 is input to the input circuit 614through the terminals 627 and 628, and the CPU 612 controls the currentsupplied from the transistor 606 to control the heat amount of the heatgenerator 608 such that the potential difference between the nodes A andB is set to a predetermined value, for example, zero voltage in thisembodiment. The air flow sensing circuit 601 illustrated in FIG. 21heats the measurement target gas 30 using the heat generator 608 suchthat a temperature increases by a predetermined temperature, forexample, 100° C. from an initial temperature of the measurement targetgas 30 at all times. In order to perform this heating control with highaccuracy, resistance values of each resistor of the heating controlbridge 640 are set such that the potential difference between the nodesA and B becomes zero when the temperature of the measurement target gas30 heated by the heat generator 608 increases by a predeterminedtemperature, for example, 100° C. from an initial temperature at alltimes. Therefore, in the air flow sensing circuit 601 of FIG. 21, theCPU 612 controls the electric current supplied to the heat generator 608such that the potential difference between the nodes A and B becomeszero.

The bridge circuit of air flow sensing 650 includes four resistancetemperature detectors of resistors 652, 654, 656, and 658. The fourresistance temperature detectors arranged along the flow of themeasurement target gas 30 such that the resistors 652 and 654 arearranged in the upstream side in the flow path of the measurement targetgas 30 with respect to the heat generator 608, and the resistors 656 and658 are arranged in the downstream side in the flow path of themeasurement target gas 30 with respect to the heat generator 608. Inaddition, in order to increase the measurement accuracy, the resistors652 and 654 are arranged such that distances to the heat generator 608are approximately equal, and the resistors 656 and 658 are arranged suchthat distances to the heat generator 608 are approximately equal.

A potential difference between a node C between the resistors 652 and656 and a node D between the resistors 654 and 658 is input to the inputcircuit 614 through the terminals 631 and 632. In order to increase themeasurement accuracy, each resistance of the bridge circuit of air flowsensing 650 is set, for example, such that a positional differencebetween the nodes C and D is set to zero while the flow of themeasurement target gas 30 is set to zero. Therefore, while the potentialdifference between the nodes C and D is set to, for example, zero, theCPU 612 outputs, from the terminal 662, an electric signal indicatingthat the flow rate of the main passage 124 is zero based on themeasurement result that the flow rate of the measurement target gas 30is zero.

When the measurement target gas 30 flows along the arrow direction inFIG. 21, the resistor 652 or 654 arranged in the upstream side is cooledby the measurement target gas 30, and the resistors 656 and 658 arrangedin the downstream side of the measurement target gas 30 are heated bythe measurement target gas 30 heated by the heat generator 608, so thatthe temperature of the resistors 656 and 658 increases. For this reason,a potential difference is generated between the nodes C and D of thebridge circuit of air flow sensing 650, and this potential difference isinput to the input circuit 614 through the terminals 631 and 632. TheCPU 612 searches data indicating a relationship between the flow rate ofthe main passage 124 and the aforementioned potential difference storedin the memory 618 based on the potential difference between the nodes Cand D of the bridge circuit of air flow sensing 650 to obtain the flowrate of the main passage 124. An electric signal indicating the flowrate of the main passage 124 obtained in this manner is output throughthe terminal 662. It is noted that, although the terminals 664 and 662illustrated in FIG. 21 are denoted by new reference numerals, they areincluded in the connection terminal 412 of FIG. 5(A), 5(B), 6(A), or6(B) described above.

The memory 618 stores the data indicating a relationship between thepotential difference between the nodes C and D and the flow rate of themain passage 124 and calibration data for reducing a measurement errorsuch as a variation, obtained based on the actual measurement value ofthe gas after production of the circuit package 400. Is noted that theactual measurement value of the gas after production of the circuitpackage 400 and the calibration value based thereon are stored in thememory 618 using the external terminal 306 or the calibration terminal307 illustrated in FIGS. 4(A) and 4(B). In this embodiment, the circuitpackage 400 is produced while an arrangement relationship between thebypass passage for flowing the measurement target gas 30 and themeasurement surface 430 or an arrangement relationship between thebypass passage for flowing the measurement target gas 30 and the heattransfer surface exposing portion 436 is maintained, with high accuracyand a little variation. Therefore, it is possible to obtain ameasurement result with remarkably high accuracy through calibrationusing the calibration value.

7.2 Configuration of Air Flow Sensing Circuit 601

FIG. 22 is a circuit configuration diagram illustrating a circuitarrangement of the air flow sensing circuit. 601 of FIG. 21 describedabove. The air flow sensing circuit 601 is manufactured from asemiconductor chip having a rectangular shape. The measurement targetgas 30 flows along the arrow direction from the left side to the rightside of the air flow sensing circuit. 601 illustrated in FIG. 22.

A diaphragm 672 having a rectangular shape with the thin semiconductorchip is formed in the air flow sensing portion (air flow sensingelement) 602 manufactured from a semiconductor chip. The diaphragm 672is provided with a thin area (that is, the aforementioned heat transfersurface) 603 indicated by the dotted line. The aforementioned gap isformed in the rear surface side of the than area 603 and communicateswith the opening 438 illustrated in FIGS. 17(A) to 17(C) or FIGS. 5(A)and 5(B), so that she gas pressure inside the gap depends on thepressure of the gas guided from the opening 438.

By reducing the thickness of the diaphragm 672, the thermal conductivityis lowered, and heat transfer to the resistors 652, 654, 658, and 656provided in the thin area (heat transfer surface) 603 of the diaphragm672 through the diaphragm 672 is suppressed, so that the temperatures ofthe resistors are approximately set through heat transfer with themeasurement target gas 30.

The heat generator 608 is provided in the center of the thin area 603 ofthe diaphragm 672, and the resistor 642 of the heating control bridge640 is provided around the heat generator 608. In addition, theresistors 644, 646, and 648 of the heating control bridge 640 areprovided in the outer side of the thin area 603. The resistors 642, 644,646, and 648 formed in this manner constitute the heating control bridge640.

In addition, the resistors 652 and 654 as upstream resistancetemperature detectors and the resistors 656 and 658 as downstreamresistance temperature detectors are arranged to interpose the heatgenerator 608. The resistors 652 and 654 as upstream resistancetemperature detectors are arranged in the upstream side in the arrowdirection where the measurement target gas 30 flows with respect to theheat generator 608. The resistors 656 and 658 as downstream resistancetemperature detectors are arranged in the downstream side in the arrowdirection where the measurement target gas 30 flows with respect to theheat generator 608. In this manner, the bridge circuit of air flowsensing 650 is formed by the resistors 652, 654, 656, and 658 arrangedin the thin area 603.

Both ends of the heat generator 608 are connected to each of theterminals 624 and 629 illustrated in the lower half of FIG. 22. Here, asillustrated in FIG. 21, the current supplied from the transistor 606 tothe heat generator 608 is applied to the terminal 624, and the terminal629 is grounded.

The resistors 642, 644, 646, and 648 of the heating control bridge 640are connected to each other and are connected to the terminals 626 and630. As illustrated in FIG. 21, the terminal 626 is supplied with apredetermined voltage 113 from the power circuit 622, and the terminal630 is grounded. In addition, the node between the resistors 642 and 646and the node between the resistors 646 and 648 are connected to theterminals 627 and 628, respectively. As illustrated in FIG. 22, theterminal 627 outputs an electric potential of the node A between theresistors 642 and 646, and the terminal 627 outputs an electricpotential of the node B between the resistors 644 and 648. Asillustrated in FIG. 21, the terminal 625 is supplied with apredetermined voltage V2 from the power circuit 622, and the terminal630 is grounded as a ground terminal. In addition, a node between theresistors 654 and 658 is connected to the terminal 631, and the terminal631 outputs an electric potential of the node B of FIG. 21. The nodebetween the resistors 652 and 656 is connected so the terminal 632, andthe terminal 632 outputs an electric potential of the node C illustratedin FIG. 21.

As illustrated in FIG. 22, since the resistor 642 of the heating controlbride 640 is formed in the vicinity of the heat generator 608, it ispossible to measure the temperature of the gas heated by the heat fromthe heat generator 608 with high accuracy. Meanwhile, since theresistors 644, 646, and 648 of the heating control bridge 640 arearranged distant from the heat generator 608, they are not easilyinfluenced by the heat generated from the heat generator 608. Theresistor 642 is configured to respond sensitively to the temperature ofthe gas heated by the heat generator 608, and the resistors 644, 646,and 648 are configured not to be influenced by the heat generator 608.For this reason, the detection accuracy of the measurement target gas 30using the heating control bridge 640 is high, and the control forheating the measurement target gas by only a predetermined temperaturefrom its initial temperature can be performed with high accuracy.

In this embodiment, a gap is formed in the rear surface side of thediaphragm 672 and communicates with the opening 438 illustrated in FIGS.17(A) to 17(C) or FIGS. 5(A) and 5(B), so that a difference between thepressure of the gap in the rear side of the diaphragm 672 and thepressure in the front side of the diaphragm 672 does not increase. It ispossible to suppress a distortion of the diaphragm 672 caused by thispressure difference. This contributes to improvement of the flow ratemeasurement accuracy.

As described above, the heat conduction through the diaphragm 672 issuppressed as small as possible by forming the thin area 603 andreducing the thickness of a portion including the thin area 603 in thediaphragm 672. Therefore, while influence of the heat conduction throughthe diaphragm 672 is suppressed, the bridge circuit of air flow sensing650 or the heating control bridge 640 more strongly tends so operatedepending on the temperature of the measurement target gas 30, so thatthe measurement operation is improved. For this reason, high measurementaccuracy is obtained.

Further, the invention is not limited to the above embodiments, butincludes various modifications. For example, the above embodiments havebeen described in detail to help with understanding, but the inventionis not necessarily limited to the entire configurations. In addition,some of the configurations of a certain embodiment may be replaced withthose of another embodiment, or the configurations of a certainembodiment may be added with those of another embodiment. In addition,some of the configurations of the embodiment may be added, omitted, andreplaced with those of another embodiment.

In addition, control lines and information lines necessary for thedescription are illustrated, so that all the control lines andinformation lines of a product are not illustrated. Practically, it maybe considered that almost all the configurations are mutually connected.

INDUSTRIAL AVAILABILITY

The present invention is applicable to a measurement apparatus formeasuring the gas flow rate as described above.

REFERENCE SIGNS LIST

-   300 thermal flow meter-   302 housing-   303 front cover-   304 rear cover-   305 external connector-   306 external terminal-   307 calibration terminal-   310 measuring portion-   320 terminal connector-   332 the bypass passage trench on frontside-   334 the bypass passage trench on backside-   356 protrusion-   361 inner socket of external terminal-   372 fixing portion (fixation wall)-   379 hollow-   380 protrusion of front cover-   381 protrusion of rear cover-   382 cavity portion-   383 concave portion of storage portion-   384 storage portion-   385 protrusion-   390 abutment portion-   400 circuit package (supporting body)-   401 leading end of circuit package-   412 connection terminal-   414 terminal-   424 protrusion-   430 measurement surface-   431 backside of measurement surface-   432 fixation surface-   436 heat transfer surface exposing portion-   438 opening-   452 temperature detecting portion-   601 air flow sensing circuit-   602 air flow sensing portion-   604 processing unit-   605 passage-   608 heat generator-   640 heating control bridge-   650 bridge circuit of air flow sensing-   672 diaphragm

The invention claimed is:
 1. A thermal flow meter comprising: a bypasspassage through which a measurement target gas received from a mainpassage flows; an air flow sensing portion which measures a heat amountby performing heat transfer through a heat transfer surface with themeasurement target gas flowing through the bypass passage; and asupporting body comprising a first resin material which is integrallyformed with the air flow sensing portion such that at least the heattransfer surface is exposed, wherein the supporting body provides a flowpath in which the air flow sensing portion is disposed and a processingunit on which a circuit is disposed, the supporting body is fixed to afixation wall which is integrally formed with the supporting body by asecond resin material and forms the bypass passage, and the flow pathprovided by the supporting body is arranged inside the bypass passage,and a storage portion having a concave portion is formed in the bypasspassage to face the fixation wall and made of a third resin materialdifferent from the first and second resin materials, and at least a partof an end portion separated from the fixation wall in the flow pathprovided by the supporting body is contained in the concave portion ofthe storage portion.
 2. The thermal flow meter according to claim 1,wherein a gap is provided between the portion contained in the concaveportion of the end portion separated from the fixation wall and theconcave portion.
 3. The thermal flow meter according to claim 1, whereinat least a corner of the end portion separated from the fixation wall iscontained in the concave portion of the storage portion.
 4. The thermalflow meter according to claim 1, wherein a protrusion is formed in thestorage portion to protrude toward the heat transfer surface of the airflow sensing portion.
 5. The thermal flow meter according to claim 4,wherein the protrusion is extended in a flow direction of themeasurement target gas from an upstream side of the heat transfersurface of the air flow sensing portion to a downstream side of the heattransfer surface of the air flow sensing portion.
 6. The thermal flowmeter according to claim 2, wherein an abutment portion is formed in theconcave portion of the storage portion to abut on the portion containedin the concave portion of the end portion separated from the fixationwall.
 7. The thermal flow meter according to claim 6, wherein theabutment portion abuts on at least any one of a front surface on a sidenear a measurement surface through which the heat transfer surface ofthe air flow sensing portion of the supporting body is exposed and abackside of measurement surface on a side opposite to the measurementsurface of the supporting body.
 8. The thermal flow meter according toclaim 2, wherein a buffer material is disposed between the portioncontained in the concave portion of the end portion separated from thefixation wall and the concave portion.
 9. The thermal flow meteraccording to claim 1, wherein the storage portion includes a pluralityof members.
 10. The thermal flow meter according to claim 9, wherein theplurality of members face the backside of measurement surface on a sideopposite to the measurement surface through which the heat transfersurface of the air flow sensing portion of the supporting body isexposed.
 11. The thermal flow meter according to claim 9, wherein a gapis provided between the plurality of members.
 12. The thermal flow meteraccording to claim 1, wherein the storage portion is disposed to beseparated from an inside wall of the bypass passage which faces thefixation wall.
 13. The thermal flow meter according to claim 12, whereinthe storage portion is formed in a cover member to make the bypasspassage on a side near the measurement surface exposing the heattransfer surface of the air flow sensing portion of the supporting bodybetween the fixation wall and an end portion of the inside wall, and ona side near the backside of measurement surface opposite to themeasurement surface between the fixation wall and the end portion of theinside wall.
 14. The thermal flow meter according to claim 13, whereinthe cover member includes a front cover which connects the end portionson a side near the measurement surface exposing the heat transfersurface of the air flow sensing portion of the supporting body betweenthe fixation wall and an end portion of the inside wall, and a rearcover which connects end portions on a side near the backside ofmeasurement surface opposite to the measurement surface between thefixation wall and the end portion of the inside wall, the storageportion includes a front cover protrusion and a rear cover protrusion toprotrude from the front cover and the rear cover toward the bypasspassage, and the front cover protrusion and the rear cover protrusionare respectively formed on the front cover and the rear cover.
 15. Thethermal flow meter according to claim 14, wherein at least one of thefront cover protrusion and the rear cover protrusion includes a hollowwhich is formed at a corner on a side near the supporting body in theleading end of the protrusion protruding toward the bypass passage, andthe concave portion of the storage portion is formed by making endsurfaces of the leading ends of the front cover protrusion and the rearcover protrusion face each other.
 16. The thermal flow meter accordingto claim 15, wherein the hollow is formed at a corner on a side near thesupporting body in the leading end of the front cover protrusion. 17.The thermal flow meter according to claim 15, wherein the front cover isbonded to end portions on a side near the measurement surface exposingthe heat transfer surface of the air flow sensing portion of thesupporting body between the fixation wall integrally formed with thesupporting body and an end portion of the inside wall of the bypasspassage, the rear cover is bonded to end portions on a side near thebackside of measurement surface opposite to the measurement surfacebetween the fixation wall and the end portion of the inside wall, andwhen end surfaces of the leading ends of the front cover protrusion andthe rear cover protrusion are made to face each other, at least a partof the end portion separated from the fixation wall in the passage ofthe supporting body integrally formed with the fixation wall iscontained in the concave portion of the storage portion which includesthe front cover protrusion and the rear cover protrusion.